Abstract:
This disclosure provides systems, methods and apparatus for actuating an electromechanical systems (EMS)-based light modulator. An actuator for an EMS-based light modulator can be formed from the combination of a drive electrode, an anchored shutter electrode, and a suspended shutter electrode. A parallel plate portion of the drive electrode along with the suspended shutter electrode form a parallel plate portion of the actuator. A zipper portion of the drive electrode and the anchored shutter electrode form a zipper portion of the actuator.
Abstract:
This disclosure provides systems, methods and apparatus for actuating an electromechanical systems (EMS)-based light modulator. An actuator for an EMS-based light modulator can be formed from the combination of a drive electrode, an anchored shutter electrode, and a suspended shutter electrode. A parallel plate portion of the drive electrode along with the suspended shutter electrode form a parallel plate portion of the actuator. A zipper portion of the drive electrode and the anchored shutter electrode form a zipper portion of the actuator.