公开(公告)号：US20150091911A1

公开(公告)日：2015-04-02

申请号：US14149231

申请日：2014-01-07

Applicant: PIXTRONIX, INC.

Inventor： Wilhelmus A. de Groot

IPC: G02B26/02 ,  H02N1/00 ,  H01L21/02 ,  G06F3/01 ,  G09G5/00 ,  B81B5/00 ,  G06T1/00

CPC classification number: G02B26/02 ,  B81B5/00 ,  G06F3/01 ,  G06T1/00 ,  G09G5/00 ,  H01L21/02 ,  H02N1/006

Abstract: Systems, methods and methods of manufacture for, among other things, a MEMS device may be provided with a pair of electrodes that are separated by a gap. At least one of the electrodes is movable toward the other electrode. The MEMS device may include a beam that is positioned within the gap and arranged between the electrodes. As the movable electrode moves toward the other electrode, a portion of the MEMS device also moves towards, comes into contact with, and deflects the beam. As the beam deflects, it applies a force upon the MEMS device that opposes the movement of electrode toward the other electrode.

Abstract translation: 除了其它之外，MEMS器件的制造方法和制造方法可以设置有由间隙分开的一对电极。 电极中的至少一个可朝向另一个电极移动。 MEMS器件可以包括位于间隙内并布置在电极之间的光束。 随着可移动电极向另一个电极移动，MEMS器件的一部分也朝向与电子束接触并偏转的移动。 当光束偏转时，其向MEMS器件施加相对于另一电极的电极移动的力。