公开(公告)号：US20200225176A1

公开(公告)日：2020-07-16

申请号：US16648373

申请日：2018-09-20

Applicant: POSTECH ACADEMY-INDUSTRY FOUNDATION

Inventor： Kyu Wook IHM ,  Mi Hyun YANG ,  Yong Jin KIM ,  Jung Sub LEE

IPC: G01N23/2251 ,  G01N23/227 ,  H01J37/073

Abstract: A method for measuring electron mobility according to the present invention, which is performed by an apparatus comprising a chamber forming a sealed space, an electron gun provided in the chamber, and a metal sample disposed opposite to the electron gun in the sealed space, comprises: an electron irradiation step of irradiating the metal sample with electrons by the electron gun; a sample current measurement step of applying a voltage to the metal sample to measure a sample current obtained in the metal sample according to the applied voltage; a secondary electron current calculation step of calculating a secondary electron current through the measured sample current; and an effective incident current definition step of defining the sum of the measured sample current and the calculated secondary electron current as an effective incident current.