公开(公告)号：US11680797B2

公开(公告)日：2023-06-20

申请号：US17442269

申请日：2020-02-19

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： Takanori Aoyagi ,  Hiroyuki Aizawa ,  Chunzhi Dong ,  Shinichi Kishimoto

IPC: G01C19/56 ,  G01P15/12 ,  G01P15/18 ,  G01C19/574 ,  G01P15/08

CPC classification number: G01C19/56 ,  G01C19/574 ,  G01P15/0802 ,  G01P15/123 ,  G01P15/18

Abstract: A physical quantity sensor includes a substrate, an anchor portion, a surrounding portion, a detecting element, a moving portion, and a beam portion. The anchor portion is formed on the same side as a principal surface of the substrate and fixed to the substrate. The surrounding portion is formed on the same side as the principal surface of the substrate and surrounds the anchor portion. The detecting element detects a physical quantity as a target of detection. The moving portion is provided with at least a part of the detecting element, formed on the same side as the principal surface of the substrate, and connected to the surrounding portion. The beam portion is formed on the same side as the principal surface of the substrate and connects the anchor portion and the surrounding portion together.