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    Angular velocity sensor
    3.
    发明授权
    Angular velocity sensor 有权

    公开(公告)号：US11692826B2

    公开(公告)日：2023-07-04

    申请号：US17599212

    申请日：2020-03-05

    Applicant: Panasonic Intellectual Property Management Co., Ltd.

    Inventor： Shoichi Taji ,  Hiroyuki Aizawa ,  Soichiro Hiraoka

    IPC: G01C19/5733 ,  G01C19/5769

    CPC classification number: G01C19/5733 ,  G01C19/5769

    Abstract: An anchor member supports a frame-shaped member. A first input electrode is located outside the frame-shaped member and separate from the frame-shaped member and fixed to a substrate. A second input electrode includes an electrode portion located outside the frame-shaped member and connected to the frame-shaped member. The second input electrode is displaceable in a prescribed direction. A first reference electrode is inside the frame-shaped member and fixed to the substrate. A second reference electrode includes an electrode portion located inside of the frame-shaped member and connected to the frame-shaped member. The second reference electrode is displaceable in the prescribed direction. In the structural component, the first input electrode and the electrode portion of the second input electrode are located between the frame-shaped member and a weight member in the prescribed direction in plan view in a thickness direction defined with respect to the substrate.

    Acceleration sensor
    5.
    发明授权
    Acceleration sensor 有权

    公开(公告)号：US10191078B2

    公开(公告)日：2019-01-29

    申请号：US15156329

    申请日：2016-05-17

    Applicant: Panasonic Intellectual Property Management Co., Ltd.

    Inventor： Atsuhiro Fujii ,  Takashi Imanaka ,  Yuichi Miyoshi ,  Hiroyuki Aizawa

    IPC: G01P15/12 ,  G01P15/08 ,  G01P21/00

    Abstract: An acceleration sensor includes a detection device, an opposed electrode, and a top lid. The detection device includes an active layer, a base layer, an oxide layer disposed between the active layer and the base layer, a first insulating layer, a contact portion, and a self-check electrode. The first insulating layer is disposed on the active layer at a side opposite to the oxide layer and provided with a first opening. The contact portion is disposed on a part of the first insulating layer at a side opposite to the active layer and includes a first metal layer connected to the active layer through the first opening. The opposed electrode is disposed at a location opposing the self-check electrode, and the top lid supports the opposed electrode.

    INERTIAL FORCE SENSOR
    6.
    发明申请
    INERTIAL FORCE SENSOR 审中-公开
    惯性力传感器

    公开(公告)号：US20150059430A1

    公开(公告)日：2015-03-05

    申请号：US14394871

    申请日：2013-04-18

    Applicant: Panasonic Intellectual Property Management Co., Ltd.

    Inventor： Takashi Imanaka ,  Hiroyuki Aizawa ,  Takeshi Yokota

    IPC: G01P21/00 ,  G01P15/12

    CPC classification number: G01P21/00 ,  G01P15/12 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/0828 ,  G01P2015/0842

    Abstract: An inertial force sensor includes a fixed part, a beam connected to the fixed part, a plummet connected to another end of the beam and being displaceable due to inertial force to cause the beam to deform, a conductive part provided at the plummet, a strain-sensitive resistor provided at the beam for detecting a deformation of the first beam, first and second fault diagnostic electrodes provided at the fixed part, a first fault diagnostic wiring for connecting the first fault diagnostic electrode to the conductive part through the beam, and a second fault diagnostic wiring for connecting the second fault diagnostic electrode to the conductive part through the beam. The inertial force sensor does not continue to output an erroneous output signal when a crack occurs in the plummet, thus having high reliability.

    Abstract translation: 惯性力传感器包括固定部分，连接到固定部分的梁，连接到梁的另一端并且由于惯性力可移动以使梁变形的对接头，设置在对中的导电部分，应变 设置在所述光束处的用于检测所述第一光束的变形的敏感电阻器，设置在所述固定部分的第一和第二故障诊断电极，用于通过所述光束将所述第一故障诊断电极连接到所述导电部件的第一故障诊断线，以及 用于通过光束将第二故障诊断电极连接到导电部件的第二故障诊断布线。 惯性力传感器在出口处出现裂纹时不会输出错误的输出信号，因此具有高可靠性。

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