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公开(公告)号:US20190319153A1
公开(公告)日:2019-10-17
申请号:US16447737
申请日:2019-06-20
Inventor: Daiki WATANABE , Hiroyuki YAMADA , Minato SENO , Akinori TSURUTA
IPC: H01L31/0747 , H01L31/0224 , H01L31/18
Abstract: An i-type layer is formed on a side of one surface of a crystalline semiconductor substrate. An n-type layer or a p-type layer is formed on the i-type layer and includes a conductive impurity. A TCO is formed on the n-type layer or the p-type layer. A density in a proximate portion of the n-type layer or the p-type layer closer to the TCO than a remote portion of the n-type layer or the p-type layer is smaller than a density in the remote portion.