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公开(公告)号:US12157180B2
公开(公告)日:2024-12-03
申请号:US17494183
申请日:2021-10-05
Inventor: Koji Funami , Kazuki Fujiwara , Izuru Nakai
Abstract: An evaluation method for evaluating laser machining in which irradiation region of a laser beam is moved relative to object to perform machining of object, includes a measurement step and an evaluation step. In the measurement step, a change in an intensity of light according to a movement of measurement region is measured by moving measurement region for measuring the intensity of light, relative to object. In the evaluation step, an evaluation of the laser machining is performed based on the change in the intensity of light according to the movement of measurement region. In the measurement step, measurement region is moved relative to object so that movement path of measurement region has a plurality of intersections with movement path of irradiation region.