公开(公告)号：US20250140736A1

公开(公告)日：2025-05-01

申请号：US19004085

申请日：2024-12-27

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： RYO FUJITA ,  MASARU HAMAHIRA

IPC: H01L23/00 ,  H01L21/66 ,  H04N23/52 ,  H04N23/55 ,  H04N23/56

Abstract: A positioning equipment includes a camera, a lens disposed in an imaging direction of the camera, a light synthesis unit, and an arithmetic equipment. The light synthesis unit is disposed between a bonding head and a stage when a first component and a second component are positioned, synthesizes light incident from the bonding head side and light incident from the stage side, and reflects the synthesized light to the lens side. The camera images a camera image based on light incident via the lens. The arithmetic equipment obtains a position correction amount between the first component and the second component based on the camera image.