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公开(公告)号:US20240032432A1
公开(公告)日:2024-01-25
申请号:US18374579
申请日:2023-09-28
Inventor: Shoji OKAMOTO , Ryouichi TAKAYAMA , Takuma KATAYAMA
IPC: H10N30/87 , H02N2/10 , H02N2/00 , H10N30/853 , H10N30/082 , H10N30/06
CPC classification number: H10N30/87 , H02N2/108 , H02N2/22 , H10N30/8548 , H10N30/082 , H10N30/06 , G02B26/0858
Abstract: A drive element includes: a fixing part; a drive part placed on a lateral side of the fixing part and coupled to the fixing part; and a movable part configured to be driven by the drive part. A lower electrode, a piezoelectric layer, and an upper electrode are formed in order in an upper surface region of the fixing part and the drive part, and in a wiring region on the fixing part side of the upper surface region, a low dielectric layer containing at least one element forming the piezoelectric layer is formed on an upper surface of the piezoelectric layer.
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公开(公告)号:US20240184101A1
公开(公告)日:2024-06-06
申请号:US18440521
申请日:2024-02-13
Inventor: Shoji OKAMOTO
CPC classification number: G02B26/105 , H02N2/108
Abstract: A drive element includes: a fixing part; an oscillating plate connected to the fixing part and having a movable part configured to rotate about a rotation axis; and a drive part placed on the oscillating plate and configured to drive the oscillating plate. The oscillating plate contains a first material having a positive linear expansion coefficient and a second material having a negative linear expansion coefficient.
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