LASER DEVICE
    1.
    发明申请

    公开(公告)号:US20220176488A1

    公开(公告)日:2022-06-09

    申请号:US17679159

    申请日:2022-02-24

    Abstract: Reference light receiver (300) receives reference light (RL) reflected by second reflecting surface (200b) of folding mirror (200). Partial light receiver (600) receives a part of laser light (LB) reflected by partial reflection mirror (500). Controller (14) detects an abnormality in an inclination angle of first reflecting surface (200a) of folding mirror (200) with respect to an optical path of laser light (LB) incident on first reflecting surface (200a) of folding mirror (200) based on an output of reference light receiver (300), and detects an abnormality in a spot of laser light (LB) on an irradiated object based on an output of partial light receiver (600).

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