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公开(公告)号：US07411188B2
公开(公告)日：2008-08-12
申请号：US11218114
申请日：2005-08-31
申请人： Paola deCecco , Bruno Schueler , David Reed , Michael Kwan , Dave Ballance
发明人： Paola deCecco , Bruno Schueler , David Reed , Michael Kwan , Dave Ballance
CPC分类号： G01N23/2273 , H01J37/26 , H01J2237/24585 , H03F1/26
摘要： A method to determine a distribution profile of an element in a film. The method comprises exciting an electron energy of an element deposited in a first film, obtaining a first spectrum associating with the electron energy, and removing a background spectrum from the first spectrum. Removing the background value generates a processed spectrum. The method further includes matching the processed spectrum to a simulated spectrum with a known simulated distribution profile for the element in a film comparable to the first film. A distribution profile is obtained for the element in the first film based on the matching of the processed spectrum to a simulated spectrum selected from the set of simulated spectra.
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2.发明申请Method and system for non-destructive distribution profiling of an element in a film 有权电影中元素的非破坏性分布分布的方法和系统公开(公告)号：US20080283743A1
公开(公告)日：2008-11-20
申请号：US12220645
申请日：2008-07-25
申请人： Paola deCecco , Bruno Schueler , David Reed , Michael Kwan , Dave Ballance
发明人： Paola deCecco , Bruno Schueler , David Reed , Michael Kwan , Dave Ballance
IPC分类号： H01J49/44
CPC分类号： G01N23/2273 , H01J37/26 , H01J2237/24585 , H03F1/26
摘要： A method to determine a distribution profile of an element in a film. The method comprises exciting an electron energy of an element deposited in a first film, obtaining a first spectrum associating with the electron energy, and removing a background spectrum from the first spectrum. Removing the background value generates a processed spectrum. The method further includes matching the processed spectrum to a simulated spectrum with a known simulated distribution profile for the element in a film comparable to the first film. A distribution profile is obtained for the element in the first film based on the matching of the processed spectrum to a simulated spectrum selected from the set of simulated spectra.
摘要翻译： 确定胶片中元素的分布特征的方法。 该方法包括激发沉积在第一膜中的元素的电子能量，获得与电子能量相关联的第一光谱，以及从第一光谱去除背景光谱。 删除背景值会生成已处理的光谱。 该方法还包括将经处理的光谱与具有与第一胶片相当的胶片中元素的已知模拟分布曲线进行匹配。 基于所处理的光谱与从所述一组模拟光谱中选择的模拟光谱的匹配，为第一胶片中的元素获得分布曲线。
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3.发明申请Method and system for non-destructive distribution profiling of an element in a film 有权电影中元素的非破坏性分布分布的方法和系统公开(公告)号：US20070010973A1
公开(公告)日：2007-01-11
申请号：US11218114
申请日：2005-08-31
申请人： Paola deCecco , Bruno Schueler , David Reed , Michael Kwan , Dave Ballance
发明人： Paola deCecco , Bruno Schueler , David Reed , Michael Kwan , Dave Ballance
CPC分类号： G01N23/2273 , H01J37/26 , H01J2237/24585 , H03F1/26
摘要： A method to determine a distribution profile of an element in a film. The method comprises exciting an electron energy of an element deposited in a first film, obtaining a first spectrum associating with the electron energy, and removing a background spectrum from the first spectrum. Removing the background value generates a processed spectrum. The method further includes matching the processed spectrum to a simulated spectrum with a known simulated distribution profile for the element in a film comparable to the first film. A distribution profile is obtained for the element in the first film based on the matching of the processed spectrum to a simulated spectrum selected from the set of simulated spectra.
摘要翻译： 确定胶片中元素的分布特征的方法。 该方法包括激发沉积在第一膜中的元素的电子能量，获得与电子能量相关联的第一光谱，以及从第一光谱去除背景光谱。 删除背景值会生成已处理的光谱。 该方法还包括将经处理的光谱与具有与第一胶片相当的胶片中元素的已知模拟分布曲线进行匹配。 基于所处理的光谱与从所述一组模拟光谱中选择的模拟光谱的匹配，为第一胶片中的元素获得分布曲线。
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4.发明授权Method and system for non-destructive distribution profiling of an element in a film 有权电影中元素的非破坏性分布分布的方法和系统公开(公告)号：US08269167B2
公开(公告)日：2012-09-18
申请号：US13021435
申请日：2011-02-04
IPC分类号： H01J37/26
CPC分类号： G01N23/2273 , H01J37/26 , H01J2237/24585 , H03F1/26
摘要： A method to determine a distribution profile of an element in a film. The method comprises exciting an electron energy of an element deposited in a first film, obtaining a first spectrum associating with the electron energy, and removing a background spectrum from the first spectrum. Removing the background value generates a processed spectrum. The method further includes matching the processed spectrum to a simulated spectrum with a known simulated distribution profile for the element in a film comparable to the first film. A distribution profile is obtained for the element in the first film based on the matching of the processed spectrum to a simulated spectrum selected from the set of simulated spectra.
摘要翻译： 确定胶片中元素的分布特征的方法。 该方法包括激发沉积在第一膜中的元素的电子能量，获得与电子能量相关联的第一光谱，以及从第一光谱去除背景光谱。 删除背景值会生成已处理的光谱。 该方法还包括将经处理的光谱与具有与第一胶片相当的胶片中元素的已知模拟分布曲线进行匹配。 基于所处理的光谱与从所述一组模拟光谱中选择的模拟光谱的匹配，为第一胶片中的元素获得分布曲线。
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公开(公告)号：US08610059B2
公开(公告)日：2013-12-17
申请号：US13593289
申请日：2012-08-23
IPC分类号： H01J37/26
CPC分类号： G01N23/2273 , H01J37/26 , H01J2237/24585 , H03F1/26
摘要： A method to determine a distribution profile of an element in a film. The method comprises exciting an electron energy of an element deposited in a first film, obtaining a first spectrum associating with the electron energy, and removing a background spectrum from the first spectrum. Removing the background value generates a processed spectrum. The method further includes matching the processed spectrum to a simulated spectrum with a known simulated distribution profile for the element in a film comparable to the first film. A distribution profile is obtained for the element in the first film based on the matching of the processed spectrum to a simulated spectrum selected from the set of simulated spectra.
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6.发明申请METHOD AND SYSTEM FOR NON-DESTRUCTIVE DISTRIBUTION PROFILING OF AN ELEMENT IN A FILM 有权电影中元素的非破坏性分布分布的方法和系统公开(公告)号：US20150069230A1
公开(公告)日：2015-03-12
申请号：US14542175
申请日：2014-11-14
IPC分类号： G01N23/227
CPC分类号： G01N23/2273 , H01J37/26 , H01J2237/24585 , H03F1/26
摘要： A method to determine a distribution profile of an element in a film. The method comprises exciting an electron energy of an element deposited in a first film, obtaining a first spectrum associating with the electron energy, and removing a background spectrum from the first spectrum. Removing the background value generates a processed spectrum. The method further includes matching the processed spectrum to a simulated spectrum with a known simulated distribution profile for the element in a film comparable to the first film. A distribution profile is obtained for the element in the first film based on the matching of the processed spectrum to a simulated spectrum selected from the set of simulated spectra.
摘要翻译： 确定胶片中元素的分布特征的方法。 该方法包括激发沉积在第一膜中的元素的电子能量，获得与电子能量相关联的第一光谱，以及从第一光谱去除背景光谱。 删除背景值会生成已处理的光谱。 该方法还包括将经处理的光谱与具有与第一胶片相当的胶片中元素的已知模拟分布曲线进行匹配。 基于所处理的光谱与从所述一组模拟光谱中选择的模拟光谱的匹配，为第一胶片中的元素获得分布曲线。
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7.发明授权Method and system for non-destructive distribution profiling of an element in a film 有权电影中元素的非破坏性分布分布的方法和系统公开(公告)号：US07884321B2
公开(公告)日：2011-02-08
申请号：US12220645
申请日：2008-07-25
IPC分类号： H01J37/26
CPC分类号： G01N23/2273 , H01J37/26 , H01J2237/24585 , H03F1/26
摘要： A method to determine a distribution profile of an element in a film. The method comprises exciting an electron energy of an element deposited in a first film, obtaining a first spectrum associating with the electron energy, and removing a background spectrum from the first spectrum. Removing the background value generates a processed spectrum. The method further includes matching the processed spectrum to a simulated spectrum with a known simulated distribution profile for the element in a film comparable to the first film. A distribution profile is obtained for the element in the first film based on the matching of the processed spectrum to a simulated spectrum selected from the set of simulated spectra.
摘要翻译： 确定胶片中元素的分布特征的方法。 该方法包括激发沉积在第一膜中的元素的电子能量，获得与电子能量相关联的第一光谱，以及从第一光谱去除背景光谱。 删除背景值会生成已处理的光谱。 该方法还包括将经处理的光谱与具有与第一胶片相当的胶片中元素的已知模拟分布曲线进行匹配。 基于所处理的光谱与从所述一组模拟光谱中选择的模拟光谱的匹配，为第一胶片中的元素获得分布曲线。
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8.发明申请METHOD AND SYSTEM FOR NON-DESTRUCTIVE DISTRIBUTION PROFILING OF AN ELEMENT IN A FILM 有权电影中元素的非破坏性分布分布的方法和系统公开(公告)号：US20110144787A1
公开(公告)日：2011-06-16
申请号：US13021435
申请日：2011-02-04
CPC分类号： G01N23/2273 , H01J37/26 , H01J2237/24585 , H03F1/26
摘要： A method to determine a distribution profile of an element in a film. The method comprises exciting an electron energy of an element deposited in a first film, obtaining a first spectrum associating with the electron energy, and removing a background spectrum from the first spectrum. Removing the background value generates a processed spectrum. The method further includes matching the processed spectrum to a simulated spectrum with a known simulated distribution profile for the element in a film comparable to the first film. A distribution profile is obtained for the element in the first film based on the matching of the processed spectrum to a simulated spectrum selected from the set of simulated spectra.
摘要翻译： 确定胶片中元素的分布特征的方法。 该方法包括激发沉积在第一膜中的元素的电子能量，获得与电子能量相关联的第一光谱，以及从第一光谱去除背景光谱。 删除背景值会生成已处理的光谱。 该方法还包括将经处理的光谱与具有与第一胶片相当的胶片中元素的已知模拟分布曲线进行匹配。 基于所处理的光谱与从所述一组模拟光谱中选择的模拟光谱的匹配，为第一胶片中的元素获得分布曲线。
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9.发明授权Method and system for non-destructive distribution profiling of an element in a film 有权电影中元素的非破坏性分布分布的方法和系统公开(公告)号：US09201030B2
公开(公告)日：2015-12-01
申请号：US14542175
申请日：2014-11-14
IPC分类号： H01J37/26 , G01N23/227 , H03F1/26
CPC分类号： G01N23/2273 , H01J37/26 , H01J2237/24585 , H03F1/26
摘要： A method to determine a distribution profile of an element in a film. The method comprises exciting an electron energy of an element deposited in a first film, obtaining a first spectrum associating with the electron energy, and removing a background spectrum from the first spectrum. Removing the background value generates a processed spectrum. The method further includes matching the processed spectrum to a simulated spectrum with a known simulated distribution profile for the element in a film comparable to the first film. A distribution profile is obtained for the element in the first film based on the matching of the processed spectrum to a simulated spectrum selected from the set of simulated spectra.
摘要翻译： 确定胶片中元素的分布特征的方法。 该方法包括激发沉积在第一膜中的元素的电子能量，获得与电子能量相关联的第一光谱，以及从第一光谱去除背景光谱。 删除背景值会生成已处理的光谱。 该方法还包括将经处理的光谱与具有与第一胶片相当的胶片中元素的已知模拟分布曲线进行匹配。 基于所处理的光谱与从所述一组模拟光谱中选择的模拟光谱的匹配，为第一胶片中的元素获得分布曲线。
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10.发明申请METHOD AND SYSTEM FOR NON-DESTRUCTIVE DISTRIBUTION PROFILING OF AN ELEMENT IN A FILM 有权电影中元素的非破坏性分布分布的方法和系统公开(公告)号：US20120318974A1
公开(公告)日：2012-12-20
申请号：US13593289
申请日：2012-08-23
IPC分类号： H01J49/44
CPC分类号： G01N23/2273 , H01J37/26 , H01J2237/24585 , H03F1/26
摘要： A method to determine a distribution profile of an element in a film. The method comprises exciting an electron energy of an element deposited in a first film, obtaining a first spectrum associating with the electron energy, and removing a background spectrum from the first spectrum. Removing the background value generates a processed spectrum. The method further includes matching the processed spectrum to a simulated spectrum with a known simulated distribution profile for the element in a film comparable to the first film. A distribution profile is obtained for the element in the first film based on the matching of the processed spectrum to a simulated spectrum selected from the set of simulated spectra.
摘要翻译： 确定胶片中元素的分布特征的方法。 该方法包括激发沉积在第一膜中的元素的电子能量，获得与电子能量相关联的第一光谱，以及从第一光谱去除背景光谱。 删除背景值会生成已处理的光谱。 该方法还包括将经处理的光谱与具有与第一胶片相当的胶片中元素的已知模拟分布曲线进行匹配。 基于所处理的光谱与从所述一组模拟光谱中选择的模拟光谱的匹配，为第一胶片中的元素获得分布曲线。
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