公开(公告)号：US5889401A

公开(公告)日：1999-03-30

申请号：US679624

申请日：1996-07-12

申请人： Pascal Jourdain ,  Lars Hallstadius ,  Kurt-.ANG.ke Magnusson ,  Gerhard Bart ,  Hans-Urs Zwicky

发明人： Pascal Jourdain ,  Lars Hallstadius ,  Kurt-.ANG.ke Magnusson ,  Gerhard Bart ,  Hans-Urs Zwicky

IPC分类号： G01B7/06 ,  G21C3/04 ,  G21C17/06 ,  G01N27/72 ,  G01R33/12

CPC分类号： G21C17/06 ,  G01B7/105

摘要： A method and apparatus for determining the thickness of at least one layer superimposed on a substrate, at least one of the layers or the substrate being a conductor of electricity. The method includes the steps of generating an electromagnetic alternating field in the vicinity of the outer most layer with a coil in order to cause any currents to be generated in the conductor which act upon the alternating field. The frequency of the alternating field is adjusted to at least two different frequencies and is measured at these frequencies. The thickness of the layers is then determined based on the measurements and the electromagnetic properties of the substrate and the layers.

摘要翻译： 一种用于确定叠加在衬底上的至少一层的厚度的方法和装置，所述层或衬底中的至少一个是电导体。 该方法包括以下步骤：在具有线圈的最外层附近产生电磁交变场，以便在作用于交变场的导体中产生任何电流。 将交变场的频率调整为至少两个不同的频率，并在这些频率处测量。 然后基于衬底和层的测量和电磁特性来确定层的厚度。