公开(公告)号：US07141080B2

公开(公告)日：2006-11-28

申请号：US11272689

申请日：2005-11-15

申请人： Patrick E. Feierabend ,  John S. Foster ,  Richard T. Martin ,  Paul J. Rubel ,  John W. Stocker ,  Jeffery F. Summers ,  Andrew D. Wallis

发明人： Patrick E. Feierabend ,  John S. Foster ,  Richard T. Martin ,  Paul J. Rubel ,  John W. Stocker ,  Jeffery F. Summers ,  Andrew D. Wallis

IPC分类号： H01L21/00

CPC分类号： B81C3/008 ,  G02B6/3512 ,  G02B6/3518 ,  G02B6/353 ,  G02B6/3546 ,  G02B6/3572 ,  G02B6/3578 ,  G02B6/3584 ,  G02B6/3586 ,  Y10T29/41

摘要： The invention describes a method and apparatus for deploying micromachined actuators in a plane which is orthogonal to the original fabrication plane of the devices. Using batch-processing, photolithographic procedures known in the micromachined electro-mechanical system (MEMS) art, a plurality of devices is constructed on a suitable substrate. The devices are then separated one from another by sawing and dicing the original fabrication wafer. The devices are rotated into an orthogonal orientation and affixed to a second wafer. The second wafer also contains circuitry for addressing and manipulating each of the devices independently of the others. With this method and apparatus, arrays of actuators are constructed whose plane of actuation is perpendicular to the plane of the array. This invention is useful for constructing N×M fiber optic switches, which direct light from N input fibers into M output fibers.

公开(公告)号：US07528691B2

公开(公告)日：2009-05-05

申请号：US11211623

申请日：2005-08-26

申请人： Andrew D. Wallis ,  John S. Foster ,  Paul J. Rubel ,  Kimon Rybnicek ,  Michael J. Shillinger ,  Jeffrey F. Summers

发明人： Andrew D. Wallis ,  John S. Foster ,  Paul J. Rubel ,  Kimon Rybnicek ,  Michael J. Shillinger ,  Jeffrey F. Summers

IPC分类号： H01H51/22

CPC分类号： H01H59/0009

摘要： Systems and methods for forming an electrostatic MEMS switch include forming a cantilevered beam on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. The hermetic seal may be a gold/indium alloy, formed by heating a layer of indium plated over a layer of gold. Electrical access to the electrostatic MEMS switch may be made by forming vias through the thickness of the second substrate.

摘要翻译： 用于形成静电MEMS开关的系统和方法包括在第一基板上形成悬臂梁，在第二基板上形成电触头，并且使用气密密封来连接两个基板。 气密密封可以是金/铟合金，通过加热镀在一层金上的铟层而形成。 可以通过形成穿过第二基板的厚度的通孔来进行对静电MEMS开关的电接入。