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公开(公告)号：US20130320244A1
公开(公告)日：2013-12-05
申请号：US13549261
申请日：2012-07-13
IPC分类号： G01J3/10
CPC分类号： G03F7/70033 , H05G2/005
摘要： Energy output from a laser-produced plasma (LPP) extreme ultraviolet light (EUV) system varies based on how well the laser beam can maintain focus on a target material to generate the plasma that gives off light. The system and method described herein optimize EUV light generation by using a closed-loop gradient process to track and fine-tune in real-time the positioning of optical elements that determine how the laser beam is focused on the target material. When real-time alignment of the drive laser on droplet position is achieved, EUV generation is optimized.
摘要翻译： 来自激光产生的等离子体（LPP）极紫外光（EUV）系统的能量输出基于激光束可以如何将目标材料上的焦点维持在多少，以产生发光的等离子体而变化。 本文所述的系统和方法通过使用闭环梯度过程来实时跟踪和微调光学元件的定位来确定激光束如何聚焦在目标材料上来优化EUV光生成。 当实现驱动激光器在液滴位置上的实时对准时，优化了EUV生成。
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公开(公告)号：US08598552B1
公开(公告)日：2013-12-03
申请号：US13549261
申请日：2012-07-13
IPC分类号： H05G2/00 , H01L21/027 , G03F7/20
CPC分类号： G03F7/70033 , H05G2/005
摘要： Energy output from a laser-produced plasma (LPP) extreme ultraviolet light (EUV) system varies based on how well the laser beam can maintain focus on a target material to generate the plasma that gives off light. The system and method described herein optimize EUV light generation by using a closed-loop gradient process to track and fine-tune in real-time the positioning of optical elements that determine how the laser beam is focused on the target material. When real-time alignment of the drive laser on droplet position is achieved, EUV generation is optimized.
摘要翻译： 来自激光产生的等离子体（LPP）极紫外光（EUV）系统的能量输出基于激光束可以如何将目标材料上的焦点维持在多少，以产生发光的等离子体而变化。 本文所述的系统和方法通过使用闭环梯度过程来实时跟踪和微调光学元件的定位来确定激光束如何聚焦在目标材料上来优化EUV光生成。 当实现驱动激光器在液滴位置上的实时对准时，优化了EUV生成。
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