VAPORIZER, ION SOURCE AND METHOD FOR GENERATING ALUMINUM-CONTAINING VAPOR

    公开(公告)号:US20240098869A1

    公开(公告)日:2024-03-21

    申请号:US17945705

    申请日:2022-09-15

    IPC分类号: H05H1/42

    CPC分类号: H05H1/42

    摘要: An ion source includes a vaporizer, an arc chamber, and a heat shield. The vaporizer includes a crucible containing an aluminum-containing material and a heater that heats the crucible. The crucible has a gas inlet and a vapor outlet. The arc chamber generates a plasma inside of the arc chamber. The vapor outlet outputs vapor into the arc chamber through a wall of the arc chamber, and the heat shield is provided between the vaporizer and the wall of the arc chamber.

    Torches and methods of using them
    10.
    发明授权

    公开(公告)号:US09686849B2

    公开(公告)日:2017-06-20

    申请号:US15042261

    申请日:2016-02-12

    发明人: Peter J Morrisroe

    CPC分类号: H05H1/30 B23K10/02 H05H1/42

    摘要: Certain embodiments described herein are directed to a torch that includes a suitable amount of a refractory material. In some embodiments, the torch can include one or more non-refractory materials in combination with a refractory material. In some embodiments, the torch can comprise a refractory material and an optically transparent window. In other embodiments, the torch can comprise a material comprising a melting point higher than the melting point of quartz.