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8 条记录 (耗时 0.039 秒)

    System and method for recovering from a power failure in a cryopump
    2.
    发明授权
    System and method for recovering from a power failure in a cryopump 有权
    用于从低温泵中的电源故障中恢复的系统和方法

    公开(公告)号：US06510697B2

    公开(公告)日：2003-01-28

    申请号：US09878160

    申请日：2001-06-07

    申请人： Maureen C. Buonpane ,  Philip D. Acomb ,  Brian D. Foley ,  Michael J. Eacobacci, Jr. ,  Stephen J. Yamartino ,  Robert M. Patterson

    发明人： Maureen C. Buonpane ,  Philip D. Acomb ,  Brian D. Foley ,  Michael J. Eacobacci, Jr. ,  Stephen J. Yamartino ,  Robert M. Patterson

    IPC分类号： B01D800

    CPC分类号： F04B37/08 ,  Y10S417/901

    摘要： In a power failure recovery, the operating state before a power failure and present conditions of a cryopump are determined to initiate a regeneration or startup process. Where the refrigerator was operating before power failure, it is turned on during recovery to condense gases in the cryopump. A startup process is initiated where the cryopump was in a startup process before the power failure and present conditions of the cryopump indicate that the cryopump is sufficiently empty or clean. If the operating state and present conditions indicate that a corrosive or hazardous liquid remains in the cryopump, a regeneration process is initiated. If the cryopump was in a shutdown process before the power failure, the cryopanel of the cryopump is refrigerated to a temperature at which gases sublimate from the cryopanel. The temperature of the cryopanel is then maintained until the gases are removed. A refrigerator having a displacer with variable speed and heaters may be used to control the temperature of the cryopanel. When the cryopump is sufficiently empty, the cryopump is turned off.

    摘要翻译： 在电源故障恢复中，确定电源故障之前的操作状态和低温泵的当前状况以启动再生或启动过程。 在电源故障前冰箱运行的地方，在回收期间打开冷凝器中的气体。 开始启动过程，在停电之前，低温泵处于起动过程中，低温泵的现状表明低温泵足够空或干净。 如果操作状态和现状表明低温泵中存在腐蚀性或危险性的液体，则会启动再生过程。 如果低温泵在电源故障之前处于关闭过程中，则将低温泵的冷冻板冷藏至气体从冷冻板升华的温度。 然后保持冷冻板的温度，直到气体被去除。 具有可变速度的置换器和加热器的冰箱可用于控制冷冻板的温度。 当低温泵足够空时，关闭低温泵。

    Helium Management Control System
    5.
    发明申请
    Helium Management Control System 审中-公开
    氦管理控制系统

    公开(公告)号：US20140130527A1

    公开(公告)日：2014-05-15

    申请号：US14001803

    申请日：2012-03-05

    申请人： Oliver J. Dumas ,  Maureen C. Buonpane ,  Doreen J. Ball-DiFazio ,  Ronald N. Morris ,  Allen J. Bartlett ,  Leonard A. Loranger ,  Joseph Chopy, JR. ,  Robert P. Sullivan ,  John J. Varone ,  Paul E. Amundsen

    发明人： Oliver J. Dumas ,  Maureen C. Buonpane ,  Doreen J. Ball-DiFazio ,  Ronald N. Morris ,  Allen J. Bartlett ,  Leonard A. Loranger ,  Joseph Chopy, JR. ,  Robert P. Sullivan ,  John J. Varone ,  Paul E. Amundsen

    IPC分类号： F25B49/02

    CPC分类号： F25B49/022 ,  A01N63/02 ,  G01N33/5085

    摘要： A refrigerant management system controls the supply of refrigerant from two or more variable speed and fixed speed compressors to a plurality of cryogenic refrigerators. The system employs a plurality of sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators. The amount of refrigerant to supply is based on an aggregate demand for refrigerant from the plurality of cryogenic refrigerators and a refrigerant correction metric. An appropriate supply of refrigerant is distributed to each cryogenic refrigerator by adjusting the speed of the variable speed compressors or, alternatively, selectively turning the compressors on or off. The speed of the variable speed compressors is adjusted by determining an amount of refrigerant to supply to the plurality of cryogenic refrigerators. If the aggregate demand for refrigerant exceeds the capacity of the compressors, then the speed of a refrigerator within the plurality of refrigerators is adjusted.

    摘要翻译： 制冷剂管理系统控制从两个或多个可变速度和固定速度的压缩机向多个低温冰箱供应制冷剂。 该系统采用多个传感器来监测和调节整个制冷剂供应，以向每个低温冰箱输送适当的制冷剂供应。 供应的制冷剂量是基于来自多个低温冰箱的制冷剂的总需求和制冷剂校正度量。 通过调节可变速度压缩机的速度或者选择性地使压缩机打开或关闭来分配适当的制冷剂供应给每个低温冰箱。 通过确定向多个低温冰箱供应的制冷剂的量来调节变速压缩机的速度。 如果对制冷剂的总需求超过压缩机的容量，则调节多个冰箱内的冰箱的速度。

    Integration of automated cryopump safety purge
    6.
    发明授权
    Integration of automated cryopump safety purge 有权

    公开(公告)号：US09970427B2

    公开(公告)日：2018-05-15

    申请号：US12177737

    申请日：2008-07-22

    申请人： Paul E. Amundsen ,  Maureen C. Buonpane ,  Douglas Andrews ,  Jordan Jacobs

    发明人： Paul E. Amundsen ,  Maureen C. Buonpane ,  Douglas Andrews ,  Jordan Jacobs

    IPC分类号： F04B37/08 ,  F04B49/06

    CPC分类号： F04B37/085 ,  F04B37/08 ,  F04B49/065

    摘要： A system and method is provided to control a purge valve during an unsafe condition associated with a cryopump. An electronic controller may be used to control the opening and closing of one or more purge valves during the unsafe condition. The purge valve can be a cryo-purge valve or exhaust purge valve. The purge valve can be a normally open valve. The electronic controller can release the normally open valve in response to the unsafe condition. The electronic controller can delay its response to the unsafe condition for a safe period of time. Attempts from other systems to control these valves during unsafe conditions can be preempted during unsafe conditions. A user can be inhibited from manually controlling the purge valve during unsafe conditions. A power failure recovery routine may be initiated in response to a restoration of power. The power failure recovery routine can respond to an unsafe condition even if the power failure recovery routine has been manually turned off by a user.

    Integration of Automated Cryopump Safety Purge
    7.
    发明申请
    Integration of Automated Cryopump Safety Purge 有权
    自动冷冻机安全清洗的整合

    公开(公告)号：US20090007574A1

    公开(公告)日：2009-01-08

    申请号：US12177737

    申请日：2008-07-22

    申请人： Paul E. Amundsen ,  Maureen C. Buonpane ,  Douglas Andrews ,  Jordan Jacobs

    发明人： Paul E. Amundsen ,  Maureen C. Buonpane ,  Douglas Andrews ,  Jordan Jacobs

    IPC分类号： B01D8/00 ,  F04B37/08 ,  F04B49/06

    CPC分类号： F04B37/085 ,  F04B37/08 ,  F04B49/065

    摘要： A system and method is provided to control a purge valve during an unsafe condition associated with a cryopump. An electronic controller may be used to control the opening and closing of one or more purge valves during the unsafe condition. The purge valve can be a cryo-purge valve or exhaust purge valve. The purge valve can be a normally open valve. The electronic controller can release the normally open valve in response to the unsafe condition. The electronic controller can delay its response to the unsafe condition for a safe period of time. Attempts from other systems to control these valves during unsafe conditions can be preempted during unsafe conditions. A user can be inhibited from manually controlling the purge valve during unsafe conditions. A power failure recovery routine may be initiated in response to a restoration of power. The power failure recovery routine can respond to an unsafe condition even if the power failure recovery routine has been manually turned off by a user.

    摘要翻译： 提供一种系统和方法来在与低温泵相关联的不安全状态期间控制排气阀。 电子控制器可用于在不安全状态期间控制一个或多个清洗阀的打开和关闭。 清洗阀可以是冷冻清洗阀或排气净化阀。 清洗阀可以是常开阀。 电子控制器可以响应不安全状态释放常开阀。 电子控制器可以在一段安全的时间内延迟其对不安全状态的响应。 在不安全的条件下，其他系统试图控制这些阀门在不安全的条件下可以被抢占。 在不安全的条件下，用户可以禁止手动控制排气阀。 可以响应于恢复功率而启动停电恢复程序。 即使用户手动关闭电源故障恢复程序，电源故障恢复程序也可以响应不安全状态。

    Integration of automated cryopump safety purge
    8.
    发明授权
    Integration of automated cryopump safety purge 有权
    整合自动化低温泵安全清洗

    公开(公告)号：US07415831B2

    公开(公告)日：2008-08-26

    申请号：US11136325

    申请日：2005-05-23

    申请人： Paul E. Amundsen ,  Maureen C. Buonpane ,  Douglas Andrews ,  Jordan Jacobs

    发明人： Paul E. Amundsen ,  Maureen C. Buonpane ,  Douglas Andrews ,  Jordan Jacobs

    IPC分类号： B01D8/00

    CPC分类号： F04B37/085 ,  F04B37/08 ,  F04B49/065

    摘要： A system and method is provided to control a purge valve during an unsafe condition associated with a cryopump. An electronic controller may be used to control the opening and closing of one or more purge valves during the unsafe condition. The purge valve can be a cryo-purge valve or exhaust purge valve. The purge valve can be a normally open valve. The electronic controller can release the normally open valve in response to the unsafe condition. The electronic controller can delay its response to the unsafe condition for a safe period of time. Attempts from other systems to control these valves during unsafe conditions can be preempted during unsafe conditions. A user can be inhibited from manually controlling the purge valve during unsafe conditions. A power failure recovery routine may be initiated in response to a restoration of power. The power failure recovery routine can respond to an unsafe condition even if the power failure recovery routine has been manually turned off by a user.

    摘要翻译： 提供一种系统和方法来在与低温泵相关联的不安全状态期间控制排气阀。 电子控制器可用于在不安全状态期间控制一个或多个清洗阀的打开和关闭。 清洗阀可以是冷冻清洗阀或排气净化阀。 清洗阀可以是常开阀。 电子控制器可以响应不安全状态释放常开阀。 电子控制器可以在一段安全的时间内延迟其对不安全状态的响应。 在不安全的条件下，其他系统试图控制这些阀门在不安全的条件下可以被抢占。 在不安全的条件下，用户可以禁止手动控制排气阀。 可以响应于恢复功率而启动停电恢复程序。 即使用户手动关闭电源故障恢复程序，电源故障恢复程序也可以响应不安全状态。