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公开(公告)号:US5069690A
公开(公告)日:1991-12-03
申请号:US660474
申请日:1991-02-21
IPC分类号: B01J20/18 , B01D53/02 , B01D53/04 , B01J20/281 , C01B9/08 , C01B21/083
CPC分类号: B01D53/04 , C01B21/0835 , C01B21/0837 , C01B9/08 , B01D2253/108 , B01D2253/308 , B01D2259/401 , B01D2259/416 , Y02P20/151 , Y10S95/902
摘要: A method is disclosed for the kinetic separation of gas mixtures using gas-solid chromatography. More specifically, a method is disclosed for the kinetically driven gas-solid chromatographic separation of NF.sub.3 from CF.sub.4 in significant volumes over a specific class of adsorbents to recover NF.sub.3 at high purities, such as 99.99% NF.sub.3.