公开(公告)号：US06523762B1

公开(公告)日：2003-02-25

申请号：US09762891

申请日：2001-02-08

申请人： Philippe Luginbuhl ,  Pierre François Indermuhle ,  Damian Twerenbold

发明人： Philippe Luginbuhl ,  Pierre François Indermuhle ,  Damian Twerenbold

IPC分类号： A62C3102

CPC分类号： B41J2/1628 ,  B41J2/14233 ,  B41J2/1617 ,  B41J2/162 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2002/14387 ,  B41J2002/14475

摘要： The invention relates to a micromechanically produced nozzle for producing reproducibly small drops which consist of a liquid container delimited by a silicon structure and a pyrex structure. The silicon structure is a silicon wafer consisting of a silicon oxide layer (SiO2) and a silicon nitride layer (SI3N4). The wafer has a nozzle of silicon oxide (SiO3), which forms a nozzle opening of a liquid container. The liquid is fed into the liquid container through a channel formed in the pyrex structure. A disk made of a piezoelectric material exerts a pressure on the liquid in the container, which passes through the nozzle in the form of a drop.

摘要翻译： 本发明涉及一种微机械制造的喷嘴，用于生产可重复地小的液滴，其由由硅结构和发烟结构限定的液体容器组成。 硅结构是由氧化硅层（SiO 2）和氮化硅层（SI3N4）组成的硅晶片。 晶片具有形成液体容器的喷嘴开口的氧化硅（SiO 3）喷嘴。 液体通过形成在发泡结构中的通道进入液体容器。 由压电材料制成的盘对容器中的液体施加压力，该液体以液滴的形式通过喷嘴。