METHOD AND APPARATUS FOR GAS FLOW CONTROL
    6.
    发明申请
    METHOD AND APPARATUS FOR GAS FLOW CONTROL 审中-公开
    用于气体流量控制的方法和装置

    公开(公告)号:US20170010625A1

    公开(公告)日:2017-01-12

    申请号:US15206180

    申请日:2016-07-08

    Abstract: An apparatus for controlling the flow of a gas, containing a controllable valve, wherein the position of the valve and the gas pressure upstream of the valve are measured and used in conjunction with a first lookup table to determine the flow rate of the gas through the valve; and a flow restrictor upstream of the controllable valve, wherein the temperature of the flow restrictor and the gas pressure upstream and downstream of the flow restrictor are measured and used in conjunction with a second lookup table to determine the flow rate of the gas through the flow restrictor.

    Abstract translation: 一种用于控制包含可控阀的气体流动的装置,其中测量阀的位置和阀上游的气体压力,并与第一查表一起使用,以确定气体通过 阀; 以及在所述可控阀上游的限流器,其中所述限流器的温度和所述限流器的上游和下游的气体压力被测量并与第二查表一起使用以确定通过所述流动的气体的流量 限流器

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