公开(公告)号：US20020127942A1

公开(公告)日：2002-09-12

申请号：US09976276

申请日：2001-10-15

Applicant: Plasmion Displays, LLC.

Inventor： Steven Kim ,  Sooho Park ,  Geun-Young Yeom ,  Young-Joon Lee

IPC: H01J009/00 ,  C03C025/68

CPC classification number: H01J9/241

Abstract: A method of fabricating a plasma display panel having a substrate includes the steps of forming an electrode on the substrate, forming a dielectric layer on the substrate including the electrode, forming at least one capillary in the dielectric layer using dry-etching, wherein the capillary and the electrode are separated apart by a portion of the dielectric layer, and sequentially removing the portion of dielectric layer to expose the electrode through the capillary.

Abstract translation: 一种制造具有衬底的等离子体显示面板的方法包括以下步骤：在衬底上形成电极，在包括电极的衬底上形成电介质层，使用干蚀刻在电介质层中形成至少一个毛细管，其中毛细管 并且电极被电介质层的一部分分开，并且依次去除电介质层的部分以通过毛细管露出电极。

公开(公告)号：US20020058209A1

公开(公告)日：2002-05-16

申请号：US09885135

申请日：2001-06-21

Applicant: Plasmion Displays LLC.

Inventor： Steven Kim ,  Geun Young Yeom ,  Young-Joon Lee

IPC: H01J009/20

CPC classification number: H01J11/12 ,  H01J9/02 ,  H01J11/38

Abstract: A method for fabricating a PDP is disclosed. The method for fabricating a PDP comprising the steps of preparing first and second panels for connecting with each other, forming at least one electrode on the first panel, forming a dielectric layer of PbO on the first panel, sequentially forming Cr and Ni on the PbO layer as a mask material of the PbO layer, performing photolithography and lift-off processes on the Ni/Cr layers to form a mask pattern of Ni/Cr, and etching the PbO layer using the mask pattern of Ni/Cr to form at least one capillary tube within the PbO layer to expose the electrode.

Abstract translation: 公开了一种用于制造PDP的方法。 一种用于制造PDP的方法，包括以下步骤：制备第一和第二面板，用于彼此连接，在第一面板上形成至少一个电极，在第一面板上形成PbO的介电层，在PbO上依次形成Cr和Ni 层作为PbO层的掩模材料，在Ni / Cr层上进行光刻和剥离处理以形成Ni / Cr的掩模图案，并使用Ni / Cr的掩模图案蚀刻PbO层以形成至少 PbO层内的一根毛细管露出电极。