公开(公告)号：US20080302701A1

公开(公告)日：2008-12-11

申请号：US12134257

申请日：2008-06-06

申请人： Po-Shin LEE

发明人： Po-Shin LEE

IPC分类号： B65D90/46 ,  H05K9/00 ,  H01L21/60

CPC分类号： H05K9/0067 ,  G03F7/70741 ,  H01L21/67353 ,  H01L21/67359 ,  H01L21/67396 ,  H01L2924/0002 ,  H01L2924/00

摘要： The present invention provides a reticle pod preventing particles in the environment from contaminating the reticle and preventing statistic electricity discharge caused by accumulated electric charge from damaging the reticle pod. The reticle pod of the present invention comprises two cover members and at least one of the cover members is made of a macromolecule material doped with metal. The metal may be stainless steel wires, conductive metal wires or metal particles.

摘要翻译： 本发明提供一种防止环境中的颗粒污染掩模版并防止由积累的电荷引起的统计放电损坏光罩舱的掩模版盒。 本发明的掩模版盒包括两个盖构件，并且至少一个覆盖构件由掺杂有金属的高分子材料制成。 金属可以是不锈钢丝，导电金属线或金属颗粒。