公开(公告)号：US11927741B2

公开(公告)日：2024-03-12

申请号：US18145302

申请日：2022-12-22

申请人： Preciseley Microtechnology Corp.

发明人： Tiansheng Zhou

IPC分类号： G02B26/08 ,  B81C1/00

CPC分类号： G02B26/085 ,  B81C1/00603 ,  G02B26/0841 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/0136

摘要： A micromirror which comprises a mirror pivotally attached to a mount by a first pivoting structure that permits pivotal movement of the mirror relative to the mount about a first axis; a first comb drive which has a first position fixed relative to the mirror and second portion fixed relative to the mount. The first comb drive being for actuating the mirror about the first axis. A weight connected to the mirror, and the weight and mirror being on opposite sides of a fulcrum of the first pivoting structure. The first axis is non-parallel to a longitudinal axis extending through the weight and the mirror.