公开(公告)号：US20140269800A1

公开(公告)日：2014-09-18

申请号：US14200427

申请日：2014-03-07

申请人： Purnawirman Purnawirman ,  Michael R. Watts ,  Ehsan Sha Hosseini ,  Jonathan D. Bradley ,  Jie Sun ,  Matteo Cherchi

发明人： Purnawirman Purnawirman ,  Michael R. Watts ,  Ehsan Sha Hosseini ,  Jonathan D. Bradley ,  Jie Sun ,  Matteo Cherchi

IPC分类号： H01S3/16 ,  H01S5/10 ,  H01S3/091

CPC分类号： H01S3/0632 ,  H01S3/0635 ,  H01S3/08059 ,  H01S3/083 ,  H01S3/091 ,  H01S3/094096 ,  H01S3/1053 ,  H01S3/1608 ,  H01S3/1636 ,  H01S3/17 ,  H01S3/2308

摘要： Examples of the present invention include integrated erbium-doped waveguide lasers designed for silicon photonic systems. In some examples, these lasers include laser cavities defined by distributed Bragg reflectors (DBRs) formed in silicon nitride-based waveguides. These DBRs may include grating features defined by wafer-scale immersion lithography, with an upper layer of erbium-doped aluminum oxide deposited as the final step in the fabrication process. The resulting inverted ridge-waveguide yields high optical intensity overlap with the active medium for both the 980 nm pump (89%) and 1.5 μm laser (87%) wavelengths with a pump-laser intensity overlap of over 93%. The output powers can be 5 mW or higher and show lasing at widely-spaced wavelengths within both the C- and L-bands of the erbium gain spectrum (1536, 1561 and 1596 nm).

摘要翻译： 本发明的实例包括为硅光子系统设计的集成铒掺杂波导激光器。 在一些示例中，这些激光器包括由在氮化硅基波导中形成的分布式布拉格反射器（DBR）限定的激光腔。 这些DBR可以包括由晶片级浸没式光刻术定义的光栅特征，其中沉积有掺杂铒的氧化铝的上层作为制造过程的最后步骤。 所产生的倒脊波导与980nm泵（89％）和1.5μm激光（87％）波长的活性介质产生高的光强度重叠，泵激光强度重叠率超过93％。 输出功率可以为5mW或更高，并且在铒增益光谱（1536,1561和1596nm）的C波段和L波段内的宽间隔波长处显示激光。