LOW RESISTANCE SWITCHES
    2.
    发明申请

    公开(公告)号:US20250040456A1

    公开(公告)日:2025-01-30

    申请号:US18715921

    申请日:2023-02-01

    Abstract: In certain aspects, a die includes fins extending in a first direction, gates formed over the fins, wherein the gates extend in a second direction that is perpendicular to the first direction, and source/drain contact layers formed over the fins, wherein the source/drain contact layers extend in the second direction, and the gates and the source/drain contact layers are interleaved. The die also includes a first gate metal layer, a second gate metal layer, wherein the source/drain contact layers are between the first gate metal layer and the second gate metal layer in the second direction, first gate vias electrically coupling the first gate metal layer to the gates, and second gate vias electrically coupling the second gate metal layer to the gates.

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