公开(公告)号：US20230422624A1

公开(公告)日：2023-12-28

申请号：US18247869

申请日：2021-12-03

Applicant: QUALCOMM Technologies, Inc.

Inventor： Robert John LITTRELL ,  Craig CORE

IPC: H10N30/853 ,  H04R17/02 ,  H10N30/05 ,  H10N30/074 ,  H10N30/30

CPC classification number: H10N30/853 ,  H04R17/02 ,  H10N30/306 ,  H10N30/074 ,  H10N30/05

Abstract: A low noise piezoelectric sensor, such as a piezoelectric acoustic transducer, includes a first conductive layer, a second conductive layer, and a piezoelectric layer between the first conductive layer and the second conductive layer. The piezoelectric layer comprises aluminum scandium nitride (AlScN) having a scandium content of greater than 15%, in which the scandium content and an aluminum content comprises 100% of the aluminum scandium nitride. In this way, the piezoelectric layer (or the sensor including the piezoelectric layer) achieves a dissipation factor of less than about 0.1%.