公开(公告)号：US20240353376A1

公开(公告)日：2024-10-24

申请号：US18573593

申请日：2021-06-29

申请人： Qorvo US, Inc.

发明人： Cody ROMBACH ,  Matthew WASILIK ,  Buu Quoc DIEP

IPC分类号： G01N29/30 ,  G01N29/02

CPC分类号： G01N29/30 ,  G01N29/022 ,  G01N2291/0255 ,  G01N2291/0426

摘要： Embodiments described herein involve a sensor test structure, comprising a substrate. A moat structure is configured to at least partially surround a resonating structure comprising at least one piezoelectric layer. An electrode comprises an electrode path. The electrode path crosses the moat region at least one time. Each moat crossing is configured to cause a change in resistance based on passivation failure of the moat structure.