公开(公告)号：US4812040A

公开(公告)日：1989-03-14

申请号：US31212

申请日：1987-03-27

申请人： R. Kenneth Marcus ,  W. W. Harrison

发明人： R. Kenneth Marcus ,  W. W. Harrison

IPC分类号： G01N21/73 ,  G01J3/10

CPC分类号： G01N21/73

摘要： Sample material is sputtered from an orifice in a disc mounted in a hollow cathode. A plasma plume is ejected from the orifice and the material sputtered from the smaple is transported directly into the base of the plasma plume. Collisions with particles in the plasma plume excite the sputtered material. Light emission and absorption from the plume are measured and ions in the plume are measured. A chamber surrounding the plasma plume is maintained at about 1 torr. About 15 cc's per minute of argon are supplied to the hollow cathode at 2 torr. The power supply supplies about 200 volts at about 0.10 amps. Low energy argon ions strick the disc at the end of the cathode tube and sputter atoms off the aperture. Atoms collide with particles in the plasma causing excitation, photon emission and ionization of atoms which are measured by optical and mass spectrometers.

摘要翻译： 样品材料从安装在中空阴极中的盘中的孔口溅射。 等离子体羽流从喷口喷射出来，从喷雾器溅出的材料直接输送到等离子体羽流的底部。 与等离子体羽流中的颗粒碰撞激发溅射的材料。 测量羽流的发光和吸收，并测量羽流中的离子。 围绕等离子体羽流的室保持在约1托。 将约15cc /分钟的氩气以2托供应到中空阴极。 电源以约0.10安培供应约200伏特。 低能量的氩离子在阴极管的末端刺入光盘，并将光源溅射出来。 原子与等离子体中的颗粒碰撞，引起光子和质谱仪测量的原子的激发，光子发射和电离。