公开(公告)号：US08547006B1

公开(公告)日：2013-10-01

申请号：US12705160

申请日：2010-02-12

申请人： R. Lawrence Ives ,  Hien T. Tran ,  Thuc Bui ,  Adam Attarian ,  William Tallis ,  John David ,  Virginia Forstall ,  Cynthia Andujar ,  Noah T. Blach ,  David B. Brown ,  Sean E. Gadson ,  Erin M. Kiley ,  Michael Read

发明人： R. Lawrence Ives ,  Hien T. Tran ,  Thuc Bui ,  Adam Attarian ,  William Tallis ,  John David ,  Virginia Forstall ,  Cynthia Andujar ,  Noah T. Blach ,  David B. Brown ,  Sean E. Gadson ,  Erin M. Kiley ,  Michael Read

IPC分类号： H01J29/02

CPC分类号： H01J23/06 ,  H01J3/027 ,  H01J25/10

摘要： A multi-beam electron gun provides a plurality N of cathode assemblies comprising a cathode, anode, and focus electrode, each cathode assembly having a local cathode axis and also a central cathode point defined by the intersection of the local cathode axis with the emitting surface of the cathode. Each cathode is arranged with its central point positioned in a plane orthogonal to a device central axis, with each cathode central point an equal distance from the device axis and with an included angle of 360/N between each cathode central point. The local axis of each cathode has a cathode divergence angle with respect to the central axis which is set such that the diverging magnetic field from a solenoidal coil is less than 5 degrees with respect to the projection of the local cathode axis onto a cathode reference plane formed by the device axis and the central cathode point, and the local axis of each cathode is also set such that the angle formed between the cathode reference plane and the local cathode axis results in minimum spiraling in the path of the electron beams in a homogenous magnetic field region of the solenoidal field generator.

摘要翻译： 多射束电子枪提供多个N个阴极组件，其包括阴极，阳极和聚焦电极，每个阴极组件具有局部阴极轴线以及由局部阴极轴线与发射表面相交的中心阴极点 的阴极。 每个阴极布置成其中心点位于与器件中心轴正交的平面中，每个阴极中心点与器件轴线相等，并且每个阴极中心点之间的夹角为360 / N。 每个阴极的局部轴线相对于中心轴线具有阴极发散角，其设定为使得来自螺线管线圈的发散磁场相对于阴极参考平面的局部阴极轴线的投影小于5度 由器件轴和中心阴极点形成，并且每个阴极的局部轴也被设置为使得在阴极参考平面和局部阴极轴之间形成的角度导致电子束在均匀的路径中的最小螺旋 磁场发生器的磁场区域。