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1.发明授权Method of forming a thin piezoelectric body metallically bonded to a propagation medium crystal 失效形成与传播介质晶体金属结合的薄压电体的方法
公开(公告)号：US3897628A
公开(公告)日：1975-08-05
申请号：US41738673
申请日：1973-11-19
Applicant: RCA CORP
Inventor： HANAK JOSEPH J , STEVENSON DAVID MICHAEL
Abstract: One surface of a piezoelectric body is polished free of surface defects. A metallic film is deposited on the damage free surface of the piezoelectric body and on one surface of a propagation medium crystal. The film surfaces of the piezoelectric body and the propagation medium crystal are bonded together. The piezoelectric body is thinned to final thickness by ion beam milling.
Abstract translation: 抛光压电体的一个表面没有表面缺陷。 金属膜沉积在压电体的无损伤表面和传播介质晶体的一个表面上。 压电体和传播介质晶体的膜表面结合在一起。 通过离子束铣削将压电体薄化成最终厚度。
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