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公开(公告)号:US20140152379A1
公开(公告)日:2014-06-05
申请号:US14089489
申请日:2013-11-25
Applicant: RENESAS ELECTRONICS CORPORATION
Inventor: Toshio FUJIMOTO , Takashi ITO
CPC classification number: H01L28/60 , G11C5/145 , H01L23/5223 , H01L27/0222 , H01L27/11526 , H01L27/11573 , H01L28/86 , H01L28/90 , H01L29/94 , H01L2924/0002 , H02M3/073 , H01L2924/00
Abstract: There is provided a capacitor with a reduced layout area. A capacitor has an electrode EL1 formed by using a first polysilicon layer, an electrode EL2 formed by using a second polysilicon layer over the first polysilicon layer, and electrodes EL3 to EL6 formed by using second through fifth metal wiring layers over the second polysilicon layer. An N-type well and the electrode EL1 make up a capacitor element 11, the electrodes EL1, EL2 make up a capacitor element 12, and the electrodes EL3 to EL6 make up a capacitor element 13. The capacitor elements 11 to 13 are coupled in parallel between terminals T1, T2.
Abstract translation: 提供了具有减小的布局面积的电容器。 电容器具有通过使用第一多晶硅层形成的电极EL1,在第一多晶硅层上使用第二多晶硅层形成的电极EL2以及通过在第二多晶硅层上使用第二至第五金属布线层形成的电极EL3至EL6。 N型阱,电极EL1构成电容器元件11,电极EL1,EL2构成电容器元件12,电极EL3〜EL6构成电容器元件13.电容器元件11〜13耦合在 端子T1,T2之间平行。