公开(公告)号：US3665245A

公开(公告)日：1972-05-23

申请号：US3665245D

申请日：1969-10-27

Applicant: RESEARCH CORP

Inventor： SCHWARZ HELMUT J

IPC: H01J41/06 ,  H01J41/14 ,  G01N27/62

CPC classification number: H01J41/14 ,  H01J41/06

Abstract: A non-magnetic ionization gauge or ion pump comprising a tube containing spaced cathodes at the same potential, with an intermediately positioned ring anode for setting up an oscillating stream of electrons that is focused or constrained within an axial path by an electric quadrupole lens arrangement which may be excited by the RF force. The quadrupole lenses create a field which is tuned firstly to lengthen and stabilize the path of the electrons thus causing greater ionization of the gas atoms in the tube, and also to expel the ions produced thereby, which ions are then collected by a cylindrical collector screen at a slightly negative potential surrounding the whole electrode structure. The collector current produced with this arrangement has been found to be approximately inversely proportional to the pressure within the range from 10 5 to 10 10 torr, so that collector currents of the order of microamperes can be obtained at very low pressure levels.