公开(公告)号：US20150091579A1

公开(公告)日：2015-04-02

申请号：US14500820

申请日：2014-09-29

申请人： MKS Instruments, Inc,

发明人： Gerardo A. Brucker ,  Timothy C. Swinney ,  Brandon J. Kelly

IPC分类号： G01L21/34 ,  H01J9/50 ,  G01L19/06

CPC分类号： G01L21/34 ,  G01L19/06 ,  H01J9/50 ,  H01J41/06 ,  Y02W30/828 ,  Y10T29/49007

摘要： A cold cathode ionization vacuum gauge includes an extended anode electrode and a cathode electrode surrounding the anode electrode along its length and forming a discharge space between the anode electrode and the cathode electrode. The vacuum gauge further includes an electrically conductive guard ring electrode interposed between the cathode electrode and the anode electrode about a base of the anode electrode to collect leakage electrical current, and a discharge starter device disposed over and electrically connected with the guard ring electrode, the starter device having a plurality of tips directed toward the anode and forming a gap between the tips and the anode.

摘要翻译： 冷阴极电离真空计包括延伸的阳极电极和沿其长度包围阳极电极的阴极电极，并在阳极电极和阴极电极之间形成放电空间。 真空计进一步包括导电保护环电极，其围绕阳极电极的底部插入在阴极电极和阳极电极之间以收集泄漏电流;以及放电启动器装置，设置在保护环电极上并与保护环电极电连接， 启动器装置具有指向阳极的多个尖端并且在尖端和阳极之间形成间隙。

公开(公告)号：US20110234233A1

公开(公告)日：2011-09-29

申请号：US12808983

申请日：2008-12-17

申请人： Gerardo A. Brucker

发明人： Gerardo A. Brucker

IPC分类号： G01L21/30 ,  G01N27/62

CPC分类号： G01L21/34 ,  G01N27/64 ,  H01J41/06

摘要： An ionization gauge includes an electron generator array that includes a microchannel plate that includes an electron generating portion of the microchannel plate comprising a source for generating seed electrons and an electron multiplier portion of the microchannel plate, responsive to the seed electrons generated by the electron generating portion, that multiplies the electrons. The ionization gauge includes an ionization volume in which the electrons impact a gaseous species, and a collector electrode for collecting ions formed by the impact between the electrons and gas species. The collector electrode can be surrounded by the anode, or the ionization gauge can be formed with multiple collector electrodes. The source of electrons can provide for a spontaneous emission of electrons, where the electrons are multiplied in a cascade.

摘要翻译： 电离计包括电子发生器阵列，其包括微通道板，该微通道板包括微通道板的电子产生部分，该微通道板包括用于产生种子电子的源和微通道板的电子倍增器部分，其响应于由电子产生产生的种子电子 部分，乘以电子。 电离计包括其中电子撞击气态物质的离子化体积，以及用于收集由电子和气体物质之间的冲击形成的离子的集电极。 集电极可以被阳极包围，或者电离计可以形成多个集电极。 电子源可以提供电子的自发发射，其中电子被级联地相乘。

公开(公告)号：US20100259273A1

公开(公告)日：2010-10-14

申请号：US12724543

申请日：2010-03-16

申请人： Yohsuke Kawasaki ,  Toshio Kikuchi

发明人： Yohsuke Kawasaki ,  Toshio Kikuchi

IPC分类号： G01L21/34

CPC分类号： G01L21/34 ,  H01J41/06

摘要： The present invention provides a cold cathode ionization vacuum gauge that can trigger discharge in a short time even in the case of use over a long period of time without needing a complicated apparatus. It has the structure in which a rod-like anode is located in an internal part of a measuring element container (cathode) having a discharge space with one end thereof which is sealed, and a discharge starting auxiliary electrode is mounted on this anode. The discharge starting auxiliary electrode triggers the discharge in a short time by the formation of a carbon nanotube layer on a discharge starting auxiliary electrode plate.

摘要翻译： 本发明提供一种冷阴极电离真空计，即使在长时间使用的情况下也能够在短时间内触发放电，而不需要复杂的装置。 具有棒状阳极位于其一端具有放电空间的测量元件容器（阴极）的内部的结构，该放电空间被密封，并且在该阳极上安装放电起始辅助电极。 放电起动辅助电极通过在放电起动辅助电极板上形成碳纳米管层而在短时间内触发放电。

公开(公告)号：US07795876B2

公开(公告)日：2010-09-14

申请号：US11885719

申请日：2006-03-02

申请人： Daniel Wetzig ,  Ludolf Gerdau

发明人： Daniel Wetzig ,  Ludolf Gerdau

IPC分类号： G01L21/30 ,  G01N27/62

CPC分类号： G01L21/34 ,  H01J41/06

摘要： A cold cathode pressure sensor has gastight housing, an anode and a cathode arranged in the housing, and a radiation source directed to the cathode for igniting a cold cathode discharge. The housing has a test gas inlet and is at least partly made of glass. The radiation source is arranged outside the housing and irradiates the cathode through the housing glass. The radiation source substantially emits a radiation of a wavelength of more than 400 nm and less than 1,400 nm.

摘要翻译： 冷阴极压力传感器具有气密的壳体，布置在壳体中的阳极和阴极以及指向阴极的用于点燃冷阴极放电的辐射源。 壳体具有测试气体入口，并且至少部分地由玻璃制成。 辐射源设置在外壳外部，并通过外壳玻璃照射阴极。 辐射源基本上发射波长大于400nm且小于1400nm的辐射。

公开(公告)号：US20090134018A1

公开(公告)日：2009-05-28

申请号：US12230968

申请日：2008-09-09

申请人： Fumio Watanabe

发明人： Fumio Watanabe

IPC分类号： C23C14/54

CPC分类号： C23C16/4412 ,  C23C14/564 ,  H01J7/24 ,  H01J41/06

摘要： An ionization vacuum device measures a pressure in a vacuum vessel, and has: an anode provided inside the vacuum vessel; a cathode provided inside the vacuum vessel; a power source for discharge that supplies electric power for discharge between the anode and the cathode; a power source for cathode-heating that supplies power for heating to the cathode, means for forming a magnetic field in a space between the anode and the cathode; control means for controlling so as to heat said cathode by said power source for cathode-heating while discharge of gas inside said vacuum vessel is caused, and so as to maintain the temperature of said cathode within a temperature range where thermonic electrons are not emitted from said cathode.

摘要翻译： 电离真空装置测量真空容器内的压力，并具有设置在真空容器内的阳极; 设置在真空容器内的阴极; 用于在阳极和阴极之间放电的电力的放电用电源; 用于向阴极供应电力的阴极加热用电源，用于在阳极和阴极之间的空间中形成磁场的装置; 控制装置，用于通过所述用于阴极加热的电源加热所述阴极，同时引起所述真空容器内部的气体排放，并且将所述阴极的温度保持在不发射热电子的温度范围内 所说阴极。

公开(公告)号：US20050028602A1

公开(公告)日：2005-02-10

申请号：US10910104

申请日：2004-08-03

申请人： Raffaele Correale

发明人： Raffaele Correale

IPC分类号： G01L21/34 ,  H01J41/06 ,  H01J41/10 ,  H01J1/62

CPC分类号： B82Y10/00 ,  H01J41/06

摘要： An ionisation vacuum gauge for measuring the residual pressure of a gaseous material remaining in a container (10), more particularly after operation of a vacuum pump comprises an electron-emitting cathode (31) made by exploiting the nanotube technology, a grid (13; 33; 133; 133′) for accelerating the electrons emitted by the cathode, and a plate (15; 35) collecting the ions and/or the ionised positive molecules of the gas. Measuring the plate current by a galvanometer allows for determining the value of the residual pressure inside the container.

摘要翻译： 用于测量残留在容器（10）中的气态材料的残余压力的电离真空计更具体地在真空泵的操作之后包括通过利用纳米管技术制成的电子发射阴极（31），栅格（13; 33; 133; 133'），用于加速由阴极发射的电子;以及板（15; 35），其收集气体的离子和/或电离的正分子。 用电流计测量板电流可以确定容器内残余压力的值。

公开(公告)号：US06737657B2

公开(公告)日：2004-05-18

申请号：US10608339

申请日：2003-06-30

申请人： Sang-Kee Kim

发明人： Sang-Kee Kim

IPC分类号： G21K510

CPC分类号： H01J37/09 ,  H01J37/3171 ,  H01J41/06 ,  H01J2237/0264 ,  H01J2237/18

摘要： An ion implanting apparatus includes an analyzer unit for analyzing ions to be implanted into a wafer from among those ions in a beam produced by an ionization, a vacuum unit for producing a vacuum in the analyzer unit, a vacuum gauge for measuring the pressure inside the analyzer unit, and a shield for preventing a magnetic field employed by the analyzer unit from affecting the vacuum gauge. The shield has a plurality of magnetic field shielding plates encircling the vacuum gauge and dielectric material inserted between the magnetic shielding plates. The shield prevents the vacuum gauge from being influenced by the magnetic field generated by the analyzer unit. Therefore, the vacuum level inside the analyzer unit can be precisely measured.

摘要翻译： 离子注入装置包括：分析器单元，用于分析从通过电离产生的光束中的那些离子中注入到晶片中的离子;分析器单元中产生真空的真空单元;用于测量内部的压力的真空计 分析器单元和用于防止分析器单元使用的磁场影响真空计的屏蔽。 屏蔽件具有环绕真空计的多个磁场屏蔽板和插在磁屏蔽板之间的电介质材料。 屏蔽层可防止真空计受到分析仪单元产生的磁场的影响。 因此，可以精确地测量分析器单元内的真空度。

公开(公告)号：US5198772A

公开(公告)日：1993-03-30

申请号：US843197

申请日：1992-02-28

申请人： Roy N. Peacock ,  Neil T. Peacock

发明人： Roy N. Peacock ,  Neil T. Peacock

IPC分类号： G01L21/34 ,  H01J41/06

CPC分类号： H01J41/06

摘要： A cold cathode gauge including a glow lamp or the like disposed within the vacuum space of the gauge for initiating the gauge discharge, the lamp emitting UV or blue light directly at at least the cathode of the gauge where the energy of the light is sufficient to release photoelectrons from the cathode to thus initiate the discharge. A member is also provided for removably positioning the glow lamp within the vacuum space whereby the lamp can be removed during bake out and then subsequent thereto, be inserted within the vacuum space to thus enhance longevity of the lamp.

摘要翻译： 一种冷阴极测量仪，包括设置在量规的真空空间内的辉光灯等，用于启动量规放电，该灯直接在光能的阴极处至少发射出紫外线或蓝光，其中光的能量足以 从阴极释放光电子，从而开始放电。 还提供一种用于将真空灯可拆卸地定位在真空空间内的构件，由此在烘烤期间随后可以将灯除去，然后将其插入真空空间内，从而提高灯的寿命。

公开(公告)号：US3665245A

公开(公告)日：1972-05-23

申请号：US3665245D

申请日：1969-10-27

申请人： RESEARCH CORP

发明人： SCHWARZ HELMUT J

IPC分类号： H01J41/06 ,  H01J41/14 ,  G01N27/62

CPC分类号： H01J41/14 ,  H01J41/06

摘要： A non-magnetic ionization gauge or ion pump comprising a tube containing spaced cathodes at the same potential, with an intermediately positioned ring anode for setting up an oscillating stream of electrons that is focused or constrained within an axial path by an electric quadrupole lens arrangement which may be excited by the RF force. The quadrupole lenses create a field which is tuned firstly to lengthen and stabilize the path of the electrons thus causing greater ionization of the gas atoms in the tube, and also to expel the ions produced thereby, which ions are then collected by a cylindrical collector screen at a slightly negative potential surrounding the whole electrode structure. The collector current produced with this arrangement has been found to be approximately inversely proportional to the pressure within the range from 10 5 to 10 10 torr, so that collector currents of the order of microamperes can be obtained at very low pressure levels.

公开(公告)号：US3614512A

公开(公告)日：1971-10-19

申请号：US3614512D

申请日：1969-04-14

申请人： PHILIPS CORP

发明人： EVRARD ROBERT

IPC分类号： H01J41/06 ,  H01J27/00

CPC分类号： H01J41/06

摘要： Ion source for use in an ion pump or other apparatus, comprising a secondary-emissive cylinder accommodating a grid. A highfrequency voltage is applied between these two electrodes so that the transit time of the diametrically moving electrons is one whole period or a multiple thereof.