Patent search ap:("RICHARD C WINGERSON") AND inv:"WINGERSON RICHARD C" Page 1

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发明授权
Sputtering protection for tantalum cathodes in plasma devices 失效
Title translation: 等离子体装置中的TANTALUM阴极的溅射保护

公开(公告)号：US3452237A

公开(公告)日：1969-06-24

申请号：US3452237D

申请日：1967-03-13

Applicant: RICHARD C WINGERSON

Inventor： WINGERSON RICHARD C

IPC: H02K44/10 , H05H1/50 , H01J17/06 , H01J61/08

CPC classification number: H02K44/10 , H05H1/50

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