公开(公告)号：US20190120625A1

公开(公告)日：2019-04-25

申请号：US15915925

申请日：2018-03-08

Applicant: RICHTEK TECHNOLOGY CORPORATION

Inventor： Chiung-Cheng Lo ,  Chiung-Wen Lin ,  Jye Ren

IPC: G01C19/5712 ,  B81B3/00

Abstract: A MEMS device, includes: a substrate; at least two driving units, located on the substrate; at least two movable structures, respectively connected to the at least two driving units; and at least two internal mass structures, or at least one internal mass structure and at least two external mass structures, the internal mass structure being connected between the two movable structures, wherein the external mass structures are connected to and located outside the two movable structures. In response to a movement of the MEMS device, the internal mass structure rotates, and the external mass structures move in opposite directions. There is no flexible element directly connecting the mass structures, so as to reduce a coupling effect between the mass structures.