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1.发明申请MEMS SENSOR, METHOD FOR MANUFACTURING THE SAME, AND MEMS PACKAGE INCLUDING THE SAME 审中-公开MEMS传感器，其制造方法和包括其的MEMS封装公开(公告)号：US20150331066A1
公开(公告)日：2015-11-19
申请号：US14713605
申请日：2015-05-15
Applicant: ROHM CO., LTD.
Inventor： Goro NAKATANI , Yoshihiro TADA
CPC classification number: G01R33/0286 , G01R33/0052 , G01R33/07
Abstract: A MEMS sensor according to the present invention includes a base substrate including a displaceably supported movable portion and a lid substrate covering the movable portion and functioning as a magnetic sensor that detects magnetism by making use of the Hall effect.
Abstract translation: 根据本发明的MEMS传感器包括基底基板，其包括可移动支撑的可动部分和覆盖可动部分的盖基板，并且用作通过利用霍尔效应来检测磁性的磁传感器。
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