公开(公告)号：US20160260631A1

公开(公告)日：2016-09-08

申请号：US15028175

申请日：2014-10-06

Applicant: RUDOLPH TECHNOLOGIES GERMANY GMBH

Inventor： Felix Möllmann ,  Dietrich Drews ,  Holger Wenz

IPC: H01L21/687 ,  G01N21/01 ,  G01N21/95 ,  H01L21/68

CPC classification number: H01L21/68707 ,  G01N21/01 ,  G01N21/9501 ,  G01N2201/023 ,  H01L21/68 ,  H01L21/6838 ,  H01L21/68721 ,  H01L21/68728 ,  H01L21/68764

Abstract: The invention relates to a holding and rotating apparatus for flat objects which define an object plane, having a gripper device that is rotatable about a rotation axis, said gripper device having a plurality of edge grippers and being designed to fix the object in a defined position in all spatial directions, the object plane being oriented perpendicularly to the rotation axis in said position, and having a rotary drive coupled to the gripper device, said rotary drive being designed to set the gripper device with the object in rotation about the rotation axis. The invention is characterized by a device for distance positioning, said device being designed to apply a supporting force, directed perpendicularly to the object plane, to the object in a contactless manner.

Abstract translation: 本发明涉及一种用于平面物体的保持和旋转装置，其定义物平面，具有可围绕旋转轴线旋转的夹持装置，所述夹持装置具有多个边缘夹持器，并被设计成将物体固定在限定位置 在所有空间方向上，所述物体平面在所述位置处垂直于所述旋转轴线定向，并且具有联接到所述夹持装置的旋转驱动器，所述旋转驱动器设计成使所述夹持装置围绕所述旋转轴线旋转。 本发明的特征在于用于距离定位的装置，所述装置被设计成以无接触的方式将垂直于物平面指向的支撑力施加到物体。