Optical angular/linear motion detector
    8.
    发明授权
    Optical angular/linear motion detector 失效
    光学角/线性运动检测器

    公开(公告)号:US4586821A

    公开(公告)日:1986-05-06

    申请号:US652041

    申请日:1984-09-19

    IPC分类号: G01D5/26 G01P3/36

    CPC分类号: G01P3/36 G01D5/266

    摘要: Angular movements of an object are detected using a laser beam reflected m a mirror on the object and focussed on the edge of a straight edge in front of a photodetector. The same laser beam may be used with the same photodetector to simultaneously or separately form a Michaelson interferometer for detecting linear movements of the object. Alternatively, two photodetectors may be used such that linear and the combination of rotational and angular movements are detected simultaneously, and three photodetectors are used to detect simultaneously linear, rotational, and the combination of linear and rotational movements. In all embodiments, a telescope multiplies mirror movement by the magnifying power of the telescope.

    摘要翻译: 使用从物体上的反射镜反射的激光束检测物体的角度运动,并聚焦在光电检测器前面的直边缘的边缘。 相同的激光束可以与相同的光电检测器一起使用以同时或分开地形成用于检测物体的线性运动的迈克尔逊干涉仪。 或者,可以使用两个光电检测器,使得同时检测线性和旋转和角运动的组合,并且三个光电检测器用于同时检测线性,旋转以及线性和旋转运动的组合。 在所有实施例中,望远镜通过望远镜的放大倍数乘以镜子运动。

    Ultra-high sensitivity interferometer
    9.
    发明授权
    Ultra-high sensitivity interferometer 失效
    超高灵敏度干涉仪

    公开(公告)号:US4548502A

    公开(公告)日:1985-10-22

    申请号:US683960

    申请日:1984-12-20

    IPC分类号: G01B9/02

    CPC分类号: G01B9/02 G01B2290/25

    摘要: A multiple reflections interferometer (MRI) which eliminates the normal angle of incidence requirement of other interferometers, such as the standard Michelson interferometer (SMI), and allows convenient choices of interferometric sensitivities, such as exactly 100 nanometers per cycle or 10 nanometers per cycle using a helium-neon laser. The MRI has the mirror that usually receives the normal incidence beam replaced by a two-mirror wedge produce multiple reflections therein to provide greater displacement sensitivities.

    摘要翻译: 多重反射干涉仪(MRI)消除了诸如标准迈克尔逊干涉仪(SMI)等其他干涉仪的正常入射角度要求,并且可以方便地选择干涉测量灵敏度,例如每周期100纳米或10纳米每周期 氦氖激光器。 MRI具有通常接收由双镜楔形成的法向入射光束的反射镜,其中产生多个反射以提供更大的位移灵敏度。