BROADBAND INTERFEROMETRY AND METHOD FOR MEASUREMENT RANGE EXTENSION BY USING SAME

    公开(公告)号:US20230324165A1

    公开(公告)日:2023-10-12

    申请号:US17716266

    申请日:2022-04-08

    Abstract: A broadband interferometry for a measurement range extension beyond a coherence length of a light source includes a wavelength tunable laser as the light source outputting a coherence wavelength beam; and an interferometer disposed between the wavelength tunable laser and a target to be measured and including a reference arm, a measurement arm and a device combining a reference beam and measurement mean to produce a combined interference beam, wherein a local oscillation of the reference beam is replicated by a cavity multiplication or cascading optical delayed lines with a fiber optic cavity, and quantifiable optical properties including a wavelength group delay, a chromatic dispersion, a polarization mode dispersion and a model dispersion are inserted into the local oscillation of the reference beam to incrementally quantify the replicated copies of the local oscillation as the number of the delayed copies of the local oscillation increase for extension of a measurement rage to the target.

    Optical fiber sensors having long active lengths, systems, and methods
    7.
    发明授权
    Optical fiber sensors having long active lengths, systems, and methods 有权
    具有长活动长度,系统和方法的光纤传感器

    公开(公告)号:US09139468B2

    公开(公告)日:2015-09-22

    申请号:US14172486

    申请日:2014-02-04

    Abstract: Optical fiber sensors adapted to measure strain or pressure are disclosed. The optical fiber sensor has a lead-in optical fiber having an end surface at a forward end, and a first optical element having a body with an outer dimension, Do, a front end surface coupled to the lead-in optical fiber, a pedestal including a retracted surface that is spaced from the front end surface, the retracted surface at least partially defining an optical cavity, a gutter surrounding the pedestal, the gutter having a gutter depth defining an active region of length, L, the first optical element further exhibiting L/Do≧0.5. Also provided are systems including the optical fiber sensor, and methods for manufacturing and using the optical fiber sensor. Numerous other aspects are provided.

    Abstract translation: 公开了适于测量应变或压力的光纤传感器。 光纤传感器具有在前端具有端面的引入光纤,以及具有外部尺寸的主体Do的第一光学元件,连接到引入光纤的前端表面,基座 包括与所述前端表面间隔开的缩回表面,所述缩回表面至少部分地限定光学腔,围绕所述基座的沟槽,所述沟槽具有限定长度有效区域L的沟槽深度,所述第一光学元件进一步 显示L /Do≥0.5。 还提供了包括光纤传感器的系统,以及用于制造和使用光纤传感器的方法。 提供了许多其他方面。

    ABSOLUTE DISTANCE LASER INTERFEROMETER
    8.
    发明申请
    ABSOLUTE DISTANCE LASER INTERFEROMETER 有权
    绝对距离激光干扰仪

    公开(公告)号:US20150019160A1

    公开(公告)日:2015-01-15

    申请号:US14284756

    申请日:2014-05-22

    Abstract: A device for absolute distance measurement includes a first tunable light source for emitting a first wavelength light of a first tunable frequency modulated by a first modulating frequency and a second light source for emitting a second wavelength light of a second frequency modulated by a second modulating frequency. An optical coupler couples the first wavelength light and the second wavelength light into an interferometer cavity. An interferometer detector provides an interference measurement signal based on a detected interference pattern. A demodulator unit generates a first demodulation signal based on the interference measurement signal by demodulation with the first modulating frequency and a second demodulation signal based on the interference measurement signal by demodulation with the second modulating frequency. A computation unit computes an absolute distance by evaluating the first demodulation signal acquired during a sweep of the first tunable frequency and the second demodulation signal.

    Abstract translation: 用于绝对距离测量的装置包括用于发射由第一调制频率调制的第一可调谐频率的第一波长光和第二光源的第一可调谐光源,用于发射由第二调制频率调制的第二频率的第二波长光 。 光耦合器将第一波长光和第二波长光耦合到干涉仪腔中。 干涉仪检测器基于检测到的干涉图案提供干扰测量信号。 解调器单元通过利用第一调制频率的解调产生基于干扰测量信号的第一解调信号,并且以第二调制频率通过解调产生基于干扰测量信号的第二解调信号。 计算单元通过评估在第一可调谐频率和第二解调信号的扫描期间获取的第一解调信号来计算绝对距离。

    Cavity opto-mechanical sensor array
    9.
    发明授权
    Cavity opto-mechanical sensor array 有权
    腔体光电传感器阵列

    公开(公告)号:US08848197B2

    公开(公告)日:2014-09-30

    申请号:US13945075

    申请日:2013-07-18

    Abstract: A mass sensor system including multiple Fabry-Perot microcavities connected in parallel by multiple waveguides. Each of the mass sensors includes a microbridge having a fundamental resonance frequency, and a movable reflective mirror etched into the microbridge; a fixed reflective mirror etched in a substrate, the fixed reflective mirror being fixed to the substrate in a region spaced apart from the movable reflective mirror; and an optical waveguide etched in the substrate that connects the movable mirror and the fixed mirror forming the Fabry-Perot microcavity interferometer. The system includes a tunable continuous-wave laser operative to optically interrogate the Fabry-Perot microcavity of each of the plurality of mass sensors, and a receiver operative to receive sensor signals from each of the plurality of mass sensors, the sensor signals comprising reflective signals and transmitted signals. A continuous-wave laser may generate optical forces that modify the motion, dynamics, or mechanical Q-factor of the microbridge.

    Abstract translation: 一种质量传感器系统,包括由多个波导并联连接的多个法布里 - 珀罗微腔。 每个质量传感器包括具有基本共振频率的微桥和蚀刻到微桥中的可移动反射镜; 在基板中蚀刻的固定反射镜,所述固定反射镜在与所述可移动反射镜间隔开的区域中固定到所述基板; 以及在连接可移动镜和形成法布里 - 珀罗微腔干涉仪的固定镜的基板中蚀刻的光波导。 该系统包括可调谐的连续波激光器,其可操作以光学询问多个质量传感器中的每一个的法布里 - 珀罗微腔,以及接收器,用于接收来自多个质量传感器中的每一个的传感器信号,传感器信号包括反射信号 并发送信号。 连续波激光器可以产生改变微桥的运动,动力学或机械Q因子的光学力。

    METHOD FOR THE ABSOLUTE MEASUREMENT OF THE FLATNESS OF THE SURFACES OF OPTICAL ELEMENTS
    10.
    发明申请
    METHOD FOR THE ABSOLUTE MEASUREMENT OF THE FLATNESS OF THE SURFACES OF OPTICAL ELEMENTS 有权
    绝对测量光学元件表面光滑度的方法

    公开(公告)号:US20140160491A1

    公开(公告)日:2014-06-12

    申请号:US14236487

    申请日:2012-08-03

    Abstract: A method for absolute measurement of flatness of surfaces of optical elements. In the method, an interferometer having a measurement axis is used for applying a three-flat method by three optical elements, by conducting actual measurements on the elements, and planes of the elements are reconstructed by an iterative processing operation in which measurements are simulated and simulated measurements are compared with the actual measurements. At least two actual measurements are made after having performed a rotation around the measurement axis and/or a translation perpendicularly to the measured axis, of a measured optical element relatively to the other.

    Abstract translation: 一种绝对测量光学元件表面平面度的方法。 在该方法中,使用具有测量轴的干涉仪通过三个光学元件施加三平面方法,通过对元件进行实际测量,并且通过迭代处理操作重建元件的平面,其中模拟测量, 将模拟测量与实际测量值进行比较。 在相对于另一测量轴测量的光学元件执行围绕测量轴的旋转和/或垂直于测量的轴的平移之后进行至少两次实际测量。

Patent Agency Ranking