公开(公告)号：US20130160523A1

公开(公告)日：2013-06-27

申请号：US13821184

申请日：2011-10-06

申请人： Ralf Peter Brinkmann ,  Jens Oberrath ,  Peter Awakowicz ,  Martin Lapke ,  Thomas Musch ,  Thomas Mussenbrock ,  Ilona Rolfes ,  Christian Schulz ,  Robert Storch ,  Tim Styrnoll ,  Christian Zietz

发明人： Ralf Peter Brinkmann ,  Jens Oberrath ,  Peter Awakowicz ,  Martin Lapke ,  Thomas Musch ,  Thomas Mussenbrock ,  Ilona Rolfes ,  Christian Schulz ,  Robert Storch ,  Tim Styrnoll ,  Christian Zietz

IPC分类号： H05H1/00

CPC分类号： H05H1/0037 ,  H01P3/085 ,  H01P5/10 ,  H05H1/0012 ,  H05H1/0081

摘要： The invention relates to a device and method for measuring the density of a plasma by determining an impulse response to a high-frequency signal coupled into a plasma. The density, electron temperature and/or collision frequency as a function of the impulse response can be determined. A probe having a probe head and a probe shaft can be introduced into the plasma, wherein the probe shaft is connected to a signal generator for electrically coupling a high-frequency signal into the probe head. The probe core is enclosed by the jacket and has at its surface mutually insulated electrode areas of opposite polarity. A balun is arranged at the transition between the probe head and an electrically unbalanced high-frequency signal feed to convert electrically unbalanced signals into balanced signals.

摘要翻译： 本发明涉及通过确定耦合到等离子体中的高频信号的脉冲响应来测量等离子体密度的装置和方法。 可以确定作为脉冲响应的函数的密度，电子温度和/或碰撞频率。 可以将具有探针头和探针轴的探头引入等离子体中，其中探针轴连接到信号发生器，用于将高频信号电耦合到探头中。 探针芯由护套封闭，并在其表面具有相反极性的相互绝缘的电极区域。 平衡 - 不平衡转换器设置在探针头和电气不平衡高频信号馈送之间的转换处，以将电不平衡信号转换为平衡信号。

公开(公告)号：US09113543B2

公开(公告)日：2015-08-18

申请号：US13821184

申请日：2011-10-06

申请人： Ralf Peter Brinkmann ,  Jens Oberrath ,  Peter Awakowicz ,  Martin Lapke ,  Thomas Musch ,  Thomas Mussenbrock ,  Ilona Rolfes ,  Christian Schulz ,  Robert Storch ,  Tim Styrnoll ,  Christian Zietz

发明人： Ralf Peter Brinkmann ,  Jens Oberrath ,  Peter Awakowicz ,  Martin Lapke ,  Thomas Musch ,  Thomas Mussenbrock ,  Ilona Rolfes ,  Christian Schulz ,  Robert Storch ,  Tim Styrnoll ,  Christian Zietz

IPC分类号： G01N9/00 ,  H05H1/00 ,  H01P3/08 ,  H01P5/10

CPC分类号： H05H1/0037 ,  H01P3/085 ,  H01P5/10 ,  H05H1/0012 ,  H05H1/0081

摘要： The invention relates to a device and method for measuring the density of a plasma by determining an impulse response to a high-frequency signal coupled into a plasma. The density, electron temperature and/or collision frequency as a function of the impulse response can be determined. A probe having a probe head and a probe shaft can be introduced into the plasma, wherein the probe shaft is connected to a signal generator for electrically coupling a high-frequency signal into the probe head. The probe core is enclosed by the jacket and has at its surface mutually insulated electrode areas of opposite polarity. A balun is arranged at the transition between the probe head and an electrically unbalanced high-frequency signal feed to convert electrically unbalanced signals into balanced signals.

摘要翻译： 本发明涉及通过确定耦合到等离子体中的高频信号的脉冲响应来测量等离子体的密度的装置和方法。 可以确定作为脉冲响应的函数的密度，电子温度和/或碰撞频率。 可以将具有探针头和探针轴的探头引入等离子体中，其中探针轴连接到信号发生器，用于将高频信号电耦合到探头中。 探针芯由护套封闭，并在其表面具有相反极性的相互绝缘的电极区域。 平衡 - 不平衡转换器设置在探针头和电气不平衡高频信号馈送之间的转换处，以将电不平衡信号转换为平衡信号。