公开(公告)号：US20100181156A1

公开(公告)日：2010-07-22

申请号：US12665413

申请日：2008-06-16

Applicant: Regis Quer ,  Christophe Taurand

Inventor： Regis Quer ,  Christophe Taurand

IPC: F16F7/00

CPC classification number: G01P15/097 ,  G01P1/003

Abstract: An electrostatic device for damping a mechanical vibration movement of a moving object, the moving object being made of an electrically conductive material, the movement of the moving object having at least one parasitic vibration mode of frequency fp to be damped, the device comprising an electrode ELE forming, with the moving object, a gap of capacitance C voltage-biased with a DC voltage V0 by a biasing circuit, the biasing circuit comprising, electrically connected in series with the electrode ELE: a load resistance R; possibly an inductance L; a parasitic capacitance Cp, characterized in that the biasing circuit further includes an electronic compensating device DEC having an impedance Zeq, which comprises a capacitance component Ceq, a resistance component Req, and possibly an inductance component Leq.

Abstract translation: 一种用于阻尼运动物体的机械振动运动的静电装置，所述运动物体由导电材料制成，所述运动物体的运动具有至少一个要衰减的频率fp的寄生振动模式，所述装置包括电极 ELE与移动物体形成通过偏置电路用直流电压V0电压偏置的电容C的间隙，所述偏置电路包括与电极ELE串联电连接：负载电阻R; 可能是电感L; 寄生电容Cp，其特征在于，所述偏置电路还包括具有阻抗Zeq的电子补偿装置DEC，其包括电容分量Ceq，电阻分量Req以及可能的电感分量Leq。

公开(公告)号：US20100089157A1

公开(公告)日：2010-04-15

申请号：US12575837

申请日：2009-10-08

Applicant: Regis Quer ,  Olivier Lefort ,  Andre Boura

Inventor： Regis Quer ,  Olivier Lefort ,  Andre Boura

IPC: G01C19/56

CPC classification number: G01P15/097 ,  G01P1/006

Abstract: The invention relates to a micromachined accelerometer in a flat plate comprising a base and at least two resonator measuring cells provided with a common mobile seismic element, the two measuring cells being placed one on each side of the common mobile seismic element along the sensitive axis of the accelerometer, such that under the effect of an acceleration, the resonator of one measuring cell undergoes a traction whilst the resonator of the other measuring cell undergoes a compression, said measuring cells respectively comprising means of amplification of the acceleration force generating the translation of the common mobile seismic element provided with a respective anchoring foot-piece. Said common mobile seismic element comprises at least two mobile seismic masses able to be displaced in translation along said sensitive axis of the accelerometer and/or in rotation with respect to a respective axis of rotation substantially orthogonal to said sensitive axis under the effect of an acceleration along said sensitive axis, connected to each other by a mechanical connecting member able to prevent, at least partly, deformations of the amplification means resulting from deformations of the accelerometer generated by external thermal stresses.

Abstract translation: 本发明涉及一种平板中的微机械加速度计，其包括基座和至少两个具有公共移动地震元件的谐振器测量单元，两个测量单元沿公共移动地震元件的每一侧沿着 加速度计，使得在加速度的作用下，一个测量单元的谐振器经历牵引，而另一个测量单元的谐振器经受压缩，所述测量单元分别包括放大加速力的装置， 公共移动地震元件设置有相应的锚固脚部。 所述公共移动地震元件包括至少两个移动地震质量，能够在加速度传感器的所述感测轴上以平移的方式移位和/或相对于基本垂直于所述敏感轴线的相应旋转轴线在加速度的作用下移动 沿着所述敏感轴线，通过机械连接构件彼此连接，所述机械连接构件能够防止由外部热应力产生的加速度计变形导致的放大装置的至少部分变形。

公开(公告)号：US20100020524A1

公开(公告)日：2010-01-28

申请号：US12518703

申请日：2007-11-28

Applicant: Serge Parbaud ,  Regis Quer ,  Alain Fourrier

Inventor： Serge Parbaud ,  Regis Quer ,  Alain Fourrier

IPC: B81B7/00

CPC classification number: B81B7/007 ,  B81C1/00238 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2924/1461 ,  H01L2924/00014 ,  H01L2924/00

Abstract: The field of the invention is that of the wiring of electromechanical micro-systems also called MEMS (the acronym standing for Micro Electro Mechanical Systems) and more particularly micro-systems carrying out measurements of physical quantities such as for example micro-gyrometers, micro-accelerometers or pressure micro-sensors. More precisely the subject of the invention is a wiring relay for an electromechanical micro-system enclosed in a protective package. A first end of a wire bond of electrically conducting material is fixed to the micro-system electrical contact. The relay is fixed to at least one internal wall. The relay consists of an electrically insulating material. According to the invention, it comprises tracks of electrically conducting material, and one track is linked electrically with at least one internal electrical contact and with a second end of a wire bond.

Abstract translation: 本发明的领域是也被称为MEMS（微机电系统的缩写）的机电微系统的布线，更具体地，是进行物理量的测量的微系统，例如微型陀螺仪， 加速度计或压力微传感器。 更准确地说，本发明的主题是用于封闭在保护性封装中的机电微系统的布线继电器。 导电材料的引线键合的第一端固定到微系统电接触。 继电器固定在至少一个内壁上。 继电器由电绝缘材料组成。 根据本发明，其包括导电材料的轨道，并且一个轨道与至少一个内部电触头和引线接合的第二端电连接。

公开(公告)号：US20060096378A1

公开(公告)日：2006-05-11

申请号：US10537297

申请日：2003-12-01

Applicant: Regis Quer ,  Jerome Inglese ,  Claude Rougeot

Inventor： Regis Quer ,  Jerome Inglese ,  Claude Rougeot

IPC: G01P15/097

CPC classification number: G01P15/097

Abstract: Accelerometer micromachined in a plane plate comprising a base, and at least one measurement cell including a moveable seismic mass connected to the base and capable of moving translationally along the sensitive y axis of the accelerometer under the effect of an acceleration γ along this y axis, a resonator cell that comprises a resonator that can vibrate and be subjected to a tensile or compressive force depending on the direction of the acceleration γ and is placed symmetrically with respect to an axis of symmetry S of the structure, this axis S being parallel to the y axis and passing through the center of gravity of the seismic mass, the measurement cell furthermore including amplification means for amplifying the acceleration force, which means comprise at least one anchoring foot for anchoring to the base, two rigid terminations of the resonator cell and two pairs of micromachined arms symmetrical with respect to the axis S, each pair comprising a first arm connecting a termination to the seismic mass, and a second arm connecting the same termination to the anchoring foot, the angle α between the Ox axis and the first arm being small enough for the tensile or compressive force exerted on the resonator to be greater than the acceleration force exerted on the seismic mass.