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    MICRO ELECTRO MECHANICAL SYSTEM
    3.
    发明申请
    MICRO ELECTRO MECHANICAL SYSTEM 审中-公开
    微电子机械系统

    公开(公告)号：US20170038210A1

    公开(公告)日：2017-02-09

    申请号：US15299772

    申请日：2016-10-21

    申请人： HITACHI, LTD.

    发明人： Munenori DEGAWA ,  Heewon JEONG

    IPC分类号： G01C19/5733 ,  G01P15/125

    CPC分类号： G01C19/5733 ,  G01C19/5712 ,  G01P1/003 ,  G01P1/023 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0814

    摘要： In order to provide a technology capable of suppressing degradation of measurement accuracy ale to fluctuation of detection sensitivity of an MEMS by suppressing fluctuation in natural frequency of the MEMS caused by a stress, first, fixed portions 3a to 3d are displaced outward in a y-direction of a semiconductor substrate 2 by deformation of the semiconductor substrate 2. Since a movable body 5 is disposed in a state of floating above the semiconductor substrate 2, it is not affected and displaced by the deformation of the semiconductor substrate 2. Therefore, a tensile stress (+σ1) occurs in the beam 4a and a compressive stress (σ2) occurs in the beam 4b. At this time, in terms of a spring system made by combining the beam 4a and the beam 4b, increase in spring constant due to the tensile stress acting on the beam 4a and decrease in spring constant due to the compressive stress acting on the beam 4b are offset against each other.

    摘要翻译： 为了提供一种能够通过抑制由应力引起的MEMS的固有频率的波动来抑制MEMS的检测灵敏度的波动的测量精度的劣化的技术，首先，固定部分3a至3d向外移位， 通过半导体基板2的变形，半导体基板2的方向。由于可移动体5以半导体基板2上方浮置的状态设置，所以不会受到半导体基板2的变形的影响和位移。因此， 在梁4a中发生拉伸应力（+σ1），并且在波束4b中发生压缩应力（σ2）。 此时，通过组合梁4a和梁4b制成的弹簧系统，由于作用在梁4a上的拉伸应力而增加弹簧常数，并且由于作用在梁4b上的压缩应力而减小弹簧常数 彼此抵消。

    Physical quantity sensor and electronic apparatus
    4.
    发明授权
    Physical quantity sensor and electronic apparatus 有权
    物理量传感器和电子设备

    公开(公告)号：US09470703B2

    公开(公告)日：2016-10-18

    申请号：US13856053

    申请日：2013-04-03

    申请人： Seiko Epson Corporation

    发明人： Satoru Tanaka

    IPC分类号： G01P15/125 ,  G01P1/00 ,  G01P15/08

    CPC分类号： G01P1/003 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0882

    摘要： A physical quantity sensor includes: a substrate; a movable body including, with a first axis as a boundary, a first movable electrode portion disposed in a first region, a second movable electrode portion disposed in a second region, and a damping adjusting portion disposed in at least one of the first region and the second region; beam portions supporting the movable body; a first fixed electrode portion; and a second fixed electrode portion. A first through-hole is disposed in the damping adjusting portion. Second through-holes are disposed in the movable electrode portions. The area of a region where the first movable electrode portion overlaps with the first fixed electrode portion is the same as the area of a region where the second movable electrode portion overlaps with the second fixed electrode portion. The width of the first through-hole is greater than the widths of the second through-holes.

    摘要翻译： 物理量传感器包括：基板; 具有第一轴作为边界的可移动体，设置在第一区域中的第一可动电极部分，设置在第二区域中的第二可动电极部分和设置在第一区域和第二区域中的至少一个中的阻尼调节部分， 第二区; 支撑移动体的梁部; 第一固定电极部分; 和第二固定电极部分。 第一通孔设置在阻尼调节部分中。 第二通孔设置在可动电极部分中。 第一可动电极部与第一固定电极部重叠的区域的面积与第二可动电极部与第二固定电极部重叠的区域的面积相同。 第一通孔的宽度大于第二通孔的宽度。

    Inertial Sensor
    5.
    发明申请
    Inertial Sensor 审中-公开
    惯性传感器

    公开(公告)号：US20160291050A1

    公开(公告)日：2016-10-06

    申请号：US15035459

    申请日：2014-10-28

    申请人： ROBERT BOSCH GMBH

    发明人： Ricardo Ehrenpfordt ,  Daniel Pantel ,  Frederik Ante

    IPC分类号： G01P1/00 ,  G01C19/5783

    CPC分类号： G01P1/003 ,  G01C19/5783 ,  G01P2015/0882

    摘要： An inertial sensor includes a first sensor element, which is damped against vibrations from an interface of the inertial sensor by a damping element. The first sensor element is configured to detect a first measured variable in a first frequency band, and the damping element is configured to dampen vibrations at least in the first frequency band. The inertial sensor further includes a second sensor element, which is mechanically coupled to the interface. The second sensor element is configured to detect a second measured variable in a second frequency band.

    摘要翻译： 惯性传感器包括第一传感器元件，该第一传感器元件抵抗来自惯性传感器的界面的阻尼元件的振动。 第一传感器元件被配置为检测第一频带中的第一测量变量，并且阻尼元件被配置为至少在第一频带中抑制振动。 惯性传感器还包括机械地联接到接口的第二传感器元件。 第二传感器元件被配置为检测第二频带中的第二测量变量。

    Vibration Damper for a Sensor Unit and Sensor Arrangement for a Motor Vehicle
    6.
    发明申请
    Vibration Damper for a Sensor Unit and Sensor Arrangement for a Motor Vehicle 有权
    传感器单元的振动阻尼器和机动车辆的传感器布置

    公开(公告)号：US20150346232A1

    公开(公告)日：2015-12-03

    申请号：US14654243

    申请日：2013-12-17

    申请人： ROBERT BOSCH GMBH

    发明人： Achim Pruksch ,  Berthold Kaeferstein

    IPC分类号： G01P1/00 ,  F16F15/04 ,  F16F1/00

    CPC分类号： F16F15/04 ,  F16F1/00 ,  F16F1/027 ,  F16F7/08 ,  F16F15/073 ,  G01D11/10 ,  G01P1/003 ,  G01P1/023 ,  G01P2015/0882

    摘要： A vibration damper for a sensor unit comprises an elastic damping element including a central plate, a plurality of damping fingers joined at a first end to the central plate, and a plurality of fastening surfaces. At least two fastening surfaces of the plurality of fastening surfaces are disposed at a distance from each other in a first spatial direction. The damping element is flexurally elastically soft along the first spatial direction and is formed with a higher stiffness in a main extension plane defined perpendicular to the first spatial direction. A layer of adhesive is applied to each of the at least two fastening surfaces which are configured to be subjected to shear stress as a result of vibrations in the main extension plane.

    摘要翻译： 用于传感器单元的减震器包括弹性阻尼元件，其包括中心板，在第一端连接到中心板的多个阻尼指，以及多个紧固表面。 多个紧固表面中的至少两个紧固表面在第一空间方向上彼此间隔开设置。 阻尼元件沿着第一空间方向弯曲弹性地柔软，并且在垂直于第一空间方向限定的主延伸平面中形成更高的刚度。 至少两个紧固表面中的每一个被施加一层粘合剂，所述至少两个紧固表面构造成由于主延伸面中的振动而经受剪切应力。

    SENSOR UNIT AND MOTION MEASUREMENT SYSTEM USING THE SAME
    7.
    发明申请
    SENSOR UNIT AND MOTION MEASUREMENT SYSTEM USING THE SAME 有权
    传感器单元和使用该传感器单元的运动测量系统

    公开(公告)号：US20130319113A1

    公开(公告)日：2013-12-05

    申请号：US13908377

    申请日：2013-06-03

    申请人： Seiko Epson Corporaion

    发明人： Kazumasa Mizuta

    IPC分类号： G01P1/02

    CPC分类号： G01P1/023 ,  G01P1/003

    摘要： The first buffer portion provides a first base portion and a first outer wall provided on a peripheral edge of the first base portion. The second buffer portion provides a second base portion which provides a mounting surface outside to a measurement target, and a second outer wall provided on a peripheral edge of the second base portion. The buffer body provides the first base portion and a top surface of the second outer wall abutting against each other. A housing portion for the sensor portion is provided inside. A holding portion which holds the sensor portion is provided at least at a part of the top surface of at least one of the first buffer portion and the second buffer portion. The sensor portion is held by the holding portion.

    摘要翻译： 第一缓冲部分提供设置在第一基部的周缘上的第一基部和第一外壁。 第二缓冲部分提供第二基部，其将安装表面提供到测量目标的外部，以及设置在第二基部的周缘上的第二外壁。 缓冲体提供第一基部和第二外壁的彼此邻接的顶表面。 传感器部分的壳体部分设置在内部。 至少在第一缓冲部分和第二缓冲部分中的至少一个的顶表面的一部分上设置保持传感器部分的保持部分。 传感器部分由保持部分保持。

    Electrostatic device for damping a mechanical vibration movement of a resonant moving object
    9.
    发明授权
    Electrostatic device for damping a mechanical vibration movement of a resonant moving object 有权
    用于阻尼共振移动物体的机械振动运动的静电装置

    公开(公告)号：US08243414B2

    公开(公告)日：2012-08-14

    申请号：US12665413

    申请日：2008-06-16

    申请人： Régis Quer ,  Christophe Taurand

    发明人： Régis Quer ,  Christophe Taurand

    IPC分类号： H01T23/00

    CPC分类号： G01P15/097 ,  G01P1/003

    摘要： An electrostatic device for damping a mechanical vibration movement of a moving object, the moving object being made of an electrically conductive material, the movement of the moving object having at least one parasitic vibration mode of frequency fp to be damped, the device comprising an electrode ELE forming, with the moving object, a gap of capacitance C voltage-biased with a DC voltage V0 by a biasing circuit, the biasing circuit comprising, electrically connected in series with the electrode ELE: a load resistance R; possibly an inductance L; a parasitic capacitance Cp, characterized in that the biasing circuit further includes an electronic compensating device DEC having an impedance Zeq, which comprises a capacitance component Ceq, a resistance component Req, and possibly an inductance component Leq.

    摘要翻译： 一种用于阻尼运动物体的机械振动运动的静电装置，所述运动物体由导电材料制成，所述运动物体的运动具有至少一个要衰减的频率fp的寄生振动模式，所述装置包括电极 ELE与移动物体形成通过偏置电路用直流电压V0电压偏置的电容C的间隙，所述偏置电路包括与电极ELE串联电连接：负载电阻R; 可能是电感L; 寄生电容Cp，其特征在于，所述偏置电路还包括具有阻抗Zeq的电子补偿装置DEC，其包括电容分量Ceq，电阻分量Req以及可能的电感分量Leq。

    DAMPED ROTARY ENCODER
    10.
    发明申请
    DAMPED ROTARY ENCODER 有权
    阻尼旋转编码器

    公开(公告)号：US20110011199A1

    公开(公告)日：2011-01-20

    申请号：US12836621

    申请日：2010-07-15

    申请人： Paul Ernest McCalmont

    发明人： Paul Ernest McCalmont

    IPC分类号： F16F15/315

    CPC分类号： F16F15/1442 ,  G01D11/10 ,  G01P1/003 ,  G01P3/44 ,  Y10T74/2131

    摘要： A tuned damped absorber arrangement is used to attenuate the response of an encoder. A vibration problem occurs on rotary axis heads which are used in machining operations. When using long slender tools, a vibration can be created which causes the encoder to lose its position. The device uses a tuned damped absorber that is attached to the input shaft of the encoder to dampen unwanted vibration.

    摘要翻译： 调谐阻尼吸收器装置用于衰减编码器的响应。 在加工操作中使用的旋转轴头产生振动问题。 当使用长长的细长工具时，可能会产生振动，导致编码器失去其位置。 该设备使用调谐的阻尼吸收器，其连接到编码器的输入轴以抑制不希望的振动。