公开(公告)号：US20050072689A1

公开(公告)日：2005-04-07

申请号：US10961499

申请日：2003-03-06

申请人： Reimar Spohr ,  Yu Apel ,  Yuri Korchev ,  Zuzanna Siwy ,  Masaru Yoshida

发明人： Reimar Spohr ,  Yu Apel ,  Yuri Korchev ,  Zuzanna Siwy ,  Masaru Yoshida

IPC分类号： B01D67/00 ,  C25F3/02 ,  H01L21/00

CPC分类号： C25F3/02 ,  B01D67/003 ,  B01D67/0032 ,  B01D2325/26

摘要： In an electrolytic cell a membrane consisting of dielectric material such as an organic polymer, which separates two chambers of the electrolytic cell from each other is produced using an etching solution which is provided in one of the chambers, contains active etching ions, while the other chamber contains a solution, which does not have an etching action. An electrical field is generated through the membrane. The etching progresses along ion tracks in the membrane and first produces one funnel-shaped pore per ion track. Immediately prior to the breakthrough, the ions, which do not have an etching action, begin to penetrate the still existent thin layer with fine pores—the active layer—and displace the ions with an etching action. An intensified electric current, driven by the adjacent field, is established and the etching process at the bottom of the pore shifts sideways according to the concentration of etching ions still present. The process is stopped by deactivating the field and flushing the membrane.

摘要翻译： 在电解槽中，使用设置在其中一个室中的蚀刻溶液来制造由诸如有机聚合物的电介质材料构成的膜，其将电解槽的两个室彼此分开，其中包含活性蚀刻离子，而另一个 室含有不具有蚀刻作用的溶液。 通过膜产生电场。 蚀刻沿膜中的离子轨道进行，并且首先在离子轨道上产生一个漏斗形孔。 在突破之前，不具有蚀刻作用的离子开始穿透具有细孔的仍然存在的薄层 - 活性层 - 并且用蚀刻作用置换离子。 建立由相邻场驱动的强化电流，并且孔底部的蚀刻工艺根据仍然存在的蚀刻离子的浓度向侧面移动。 通过停用场并冲洗膜来停止该过程。