公开(公告)号：US08692441B2

公开(公告)日：2014-04-08

申请号：US13907046

申请日：2013-05-31

Applicant: Research Triangle Institute

Inventor： David Dausch ,  Scott H. Goodwin

IPC: H01L41/047 ,  H01L41/053 ,  H01L41/107 ,  H03H9/15 ,  B31D3/00

CPC classification number: H01L41/0474 ,  B06B1/0607 ,  G10K11/004 ,  H01L41/0973 ,  H01L41/29 ,  H01L41/293 ,  H01L41/332

Abstract: A method is provided for forming a piezoelectric ultrasonic transducer apparatus having a first electrode deposited on a dielectric layer disposed on a primary substrate. A piezoelectric material is deposited between the first electrode and a second electrode, to form a transducer device. At least the piezoelectric material is patterned such that a portion of the first electrode extends laterally outward therefrom. The primary substrate and the dielectric layer are etched to form a first via extending to the laterally outward portion of the first electrode, and a first conductive material is deposited to substantially fill the first via and form an electrically-conductive engagement with the laterally outward portion of the first electrode. The primary substrate is etched to define a second via extending therethrough, wherein the second via is laterally spaced apart from the first via. An associated method and apparatus are also provided.

Abstract translation: 提供一种用于形成压电超声换能器装置的方法，该装置具有沉积在设置在初级基底上的电介质层上的第一电极。 压电材料沉积在第一电极和第二电极之间，以形成换能器装置。 至少压电材料被图案化，使得第一电极的一部分从其横向向外延伸。 蚀刻初级衬底和电介质层以形成延伸到第一电极的横向向外部分的第一通孔，并且沉积第一导电材料以基本上填充第一通孔并与横向向外部分形成导电接合 的第一电极。 蚀刻初级衬底以限定延伸穿过其中的第二通孔，其中第二通孔与第一通路横向间隔开。 还提供了相关联的方法和装置。

公开(公告)号：US20130270967A1

公开(公告)日：2013-10-17

申请号：US13907046

申请日：2013-05-31

Applicant: Research Triangle Institute

Inventor： David Dausch ,  Scott H. Goodwin

IPC: H01L41/047 ,  H01L41/293

CPC classification number: H01L41/0474 ,  B06B1/0607 ,  G10K11/004 ,  H01L41/0973 ,  H01L41/29 ,  H01L41/293 ,  H01L41/332

Abstract: A method is provided for forming a piezoelectric ultrasonic transducer apparatus having a first electrode deposited on a dielectric layer disposed on a primary substrate. A piezoelectric material is deposited between the first electrode and a second electrode, to form a transducer device. At least the piezoelectric material is patterned such that a portion of the first electrode extends laterally outward therefrom. The primary substrate and the dielectric layer are etched to form a first via extending to the laterally outward portion of the first electrode, and a first conductive material is deposited to substantially fill the first via and form an electrically-conductive engagement with the laterally outward portion of the first electrode. The primary substrate is etched to define a second via extending therethrough, wherein the second via is laterally spaced apart from the first via. An associated method and apparatus are also provided.

Abstract translation: 提供一种用于形成压电超声换能器装置的方法，该装置具有沉积在设置在初级基底上的电介质层上的第一电极。 压电材料沉积在第一电极和第二电极之间，以形成换能器装置。 至少压电材料被图案化，使得第一电极的一部分从其横向向外延伸。 蚀刻初级衬底和电介质层以形成延伸到第一电极的横向向外部分的第一通孔，并且沉积第一导电材料以基本上填充第一通孔并与横向向外部分形成导电接合 的第一电极。 蚀刻初级衬底以限定延伸穿过其中的第二通孔，其中第二通孔与第一通路横向间隔开。 还提供了相关联的方法和装置。