公开(公告)号：US10964523B1

公开(公告)日：2021-03-30

申请号：US16986424

申请日：2020-08-06

申请人： RnD-ISAN, Ltd ,  ISTEQ B.V.

发明人： Robert Rafilevich Gayasov ,  Denis Alexandrovich Glushkov ,  Yurii Borisovich Kiryukhin ,  Vladimir Mikhailovich Krivtsun ,  Aleksandr Andreevich Lash

IPC分类号： H01J61/62 ,  H01J61/16 ,  H01J61/30 ,  H01J61/52

摘要： The invention relates to plasma light sources with a continuous optical discharge (COD). The light source contains a gas filled chamber with a region of radiating plasma sustained by a focused beam of a CW laser. A density of gas particles in the chamber is less than 90·1019 cm−3 and a temperature of the chamber is in a range from 600 to 900 K or optionally higher. Preferably the density of gas particles is as low as possible and the temperature of the inner surface of the chamber at operation is as high as possible under providing a gas pressure in the chamber of about 50 bar or more. The technical result of the invention consists in providing COD sustaining conditions, which are optimal for achieving high stability and high brightness of the radiating plasma, in the creation on this basis of broadband light sources with ultra-high brightness and stability.

公开(公告)号：US11875986B2

公开(公告)日：2024-01-16

申请号：US17962148

申请日：2022-10-07

申请人： RnD-ISAN, Ltd ,  ISTEQ B.V.

发明人： Dmitriy Borisovich Abramenko ,  Robert Rafilevich Gayasov ,  Denis Alexandrovich Glushkov ,  Yurii Borisovich Kiryukhin ,  Vladimir Mikhailovich Krivtsun ,  Aleksandr Andreevich Lash

IPC分类号： H01J65/00 ,  H01S3/23 ,  H01J61/16 ,  H01S3/1115 ,  H01S3/092

CPC分类号： H01J65/00 ,  H01J61/16 ,  H01S3/092 ,  H01S3/1115 ,  H01S3/23

摘要： The light source contains a gas-filled chamber with a plasma sustained by a focused beam of a continuous wave laser. The means for plasma ignition is a solid-state laser system which generates two pulsed laser beams: in a free running mode and in a Q-switched mode. The solid-state laser system contains single active element and its optical cavity is equipped with a Q-switch overlapping only part of a cross section of the intracavity laser beam. One pulsed laser beam provides an optical breakdown after which another pulsed laser beam ignites the plasma, the volume and density of which are sufficient for stationary sustenance of the plasma by the focused beam of the continuous wave laser. EFFECT: simplification of the design of the light source, increase of its reliability and ease of use, creating on this basis of powerful electrode-free high-brightness broadband light sources with high spatial and energy stability.

公开(公告)号：US11503696B2

公开(公告)日：2022-11-15

申请号：US17514178

申请日：2021-10-29

申请人： RnD-ISAN, Ltd ,  ISTEQ B.V.

发明人： Dmitriy Borisovich Abramenko ,  Yurii Borisovich Kiryukhin ,  Denis Alexandrovich Glushkov ,  Vladimir Mikhailovich Krivtsun ,  Aleksandr Andreevich Lash

IPC分类号： H05G2/00

摘要： A light source with radiating plasma sustained in the gas-filled chamber by a focused beam of CW laser. The gas is inert gas with a purity of at least 99.99%. The chamber contains a metal housing with at least one window made of MgF2 for outputting a plasma radiation. Each window is located in a hole of the housing on the end of a sleeve and is soldered to the sleeve by means of glass cement, and each sleeve is welded to the hole of the metal housing on the outside seam. The sleeves and the housing are made of an alloy with a coefficient of linear thermal expansion (CLTE), matched with the CLTE of the MgF2 crystal in the direction perpendicular to the optical axis of the MgF2 crystal. The technical result consists in expanding the radiation spectrum of the light source into the VUV region.

公开(公告)号：US10770282B1

公开(公告)日：2020-09-08

申请号：US16814317

申请日：2020-03-10

申请人： RnD-ISAN, Ltd

发明人： Dmitry Borisovich Abramenko ,  Robert Rafilevich Gayasov ,  Yurii Borisovich Kiryukhin ,  Vladimir Mikhailovich Krivtsun ,  Aleksandr Andreevich Lash

IPC分类号： H01J61/54 ,  H01J61/30 ,  H01J61/02

摘要： The light source contains a gas filled chamber with a region of radiating plasma sustained by a focused beam of a CW laser. The means for plasma ignition is a pulsed laser system generating a first and a second laser beams focused in the chamber. The first laser beam provides the optical breakdown, after which the second laser beam ignites the plasma, whose volume and density are sufficient for stationary plasma sustenance by CW laser after finishing the second laser pulse. Preferably, the first laser beam is generated in Q-switching mode and the second laser beam is generated in free-running mode. The technical result consists in ensuring high reliability of igniting the plasma, in creating in this basis electrodeless high-brightness broadband light sources with the high spatial and power stability, and in providing an ability to collect broadband plasma radiation in a spatial angle of more than 9 sr.