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公开(公告)号：US20220388839A1
公开(公告)日：2022-12-08
申请号：US17770561
申请日：2020-10-12
Applicant: Robert Bosch GmbH
Inventor： Volker Becker , Franz Laermer , Daniel Pantel
Abstract: In a method for creating hydrophilic surfaces or surface regions on one or more silicon surfaces of a substrate, a vapour phase of hydrogen peroxide is generated in a reactor by heating an aqueous hydrogen peroxide solution. The substrate having the silicon surface or surfaces to be treated is exposed to the vapour phase, whereby a hydrophilisation of the silicon surfaces in achieved.
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