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公开(公告)号：US08718809B2
公开(公告)日：2014-05-06
申请号：US12778457
申请日：2010-05-12
IPC分类号： G06F19/00
CPC分类号： G06N99/005 , G06F2217/10
摘要： A system for determining a group of semiconductor manufacturing process steps with a similar influence on individual semiconductor products. The system generates a first table including time stamps for the individual semiconductor products. The system creates a second table including Q-times based on the first table. The Q-times refers to time differences between every pair of the time stamps. The system forms a dependency table by grouping the Q-times with similar dependencies together. The system identifies groups of the similar dependencies. The system extracts semiconductor process steps belonging to the groups.
摘要翻译： 一种用于确定对各个半导体产品具有相似影响的一组半导体制造工艺步骤的系统。 该系统产生包括各个半导体产品的时间戳的第一表。 系统创建第二个表，其中包括基于第一个表的Q次。 Q时间是指每对时间戳之间的时差。 系统通过将Q次与相似的依赖关系分组在一起来形成依赖关系表。 系统识别类似依赖关系的组。 系统提取属于这些组的半导体工艺步骤。
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2.发明授权Enhancing investigation of variability by inclusion of similar objects with known differences to the original ones 有权通过将具有已知差异的相似对象与原始对象相结合，来增强对变异性的调查公开(公告)号：US08315729B2
公开(公告)日：2012-11-20
申请号：US12775107
申请日：2010-05-06
CPC分类号： G06F17/50 , G01R31/2894 , H01L22/14 , H01L22/20 , H01L2924/0002 , H01L2924/00
摘要： A system, method and/or computer program product for analyzing a functionality of at least two manufactured products obtain a first characteristic of a first manufactured product. The system acquires a second characteristic of a second manufactured product. The system identifies a common feature between the first characteristic and the second characteristic. The system identifies a distinguishable feature between the first characteristic and the second characteristic. The system determines a cause of a deviation of a functionality in the first manufactured product or the second manufactured product or both manufactured products based on the identified common feature or the identified distinguishable feature or both features.
摘要翻译： 用于分析至少两个制造产品的功能的系统，方法和/或计算机程序产品获得第一制成品的第一特征。 该系统获得第二制造产品的第二特性。 该系统识别第一特征和第二特性之间的共同特征。 该系统识别第一特征和第二特性之间的区别特征。 该系统基于所识别的共同特征或所识别的可区分特征或两个特征来确定第一制造产品或第二制造产品或两个制造产品中的功能性偏差的原因。
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3.发明申请ENHANCING INVESTIGATION OF VARIABILITY BY INCLUSION OF SIMILAR OBJECTS WITH KNOWN DIFFERENCES TO THE ORIGINAL ONES 有权通过将具有已知差异的类似对象包含在原始主题中来增强可变性的调查公开(公告)号：US20110276170A1
公开(公告)日：2011-11-10
申请号：US12775107
申请日：2010-05-06
IPC分类号： G06F17/00
CPC分类号： G06F17/50 , G01R31/2894 , H01L22/14 , H01L22/20 , H01L2924/0002 , H01L2924/00
摘要： A system, method and/or computer program product for analyzing a functionality of at least two manufactured products obtain a first characteristic of a first manufactured product. The system acquires a second characteristic of a second manufactured product. The system identifies a common feature between the first characteristic and the second characteristic. The system identifies a distinguishable feature between the first characteristic and the second characteristic. The system determines a cause of a deviation of a functionality in the first manufactured product or the second manufactured product or both manufactured products based on the identified common feature or the identified distinguishable feature or both features.
摘要翻译： 用于分析至少两个制造产品的功能的系统，方法和/或计算机程序产品获得第一制成品的第一特征。 该系统获得第二制造产品的第二特性。 该系统识别第一特征和第二特性之间的共同特征。 该系统识别第一特征和第二特性之间的区别特征。 该系统基于所识别的共同特征或所识别的可区分特征或两个特征来确定第一制造产品或第二制造产品或两个制造产品中的功能性偏差的原因。
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公开(公告)号：US08328950B2
公开(公告)日：2012-12-11
申请号：US12783702
申请日：2010-05-20
IPC分类号： B08B7/04
CPC分类号： B08B13/00 , H01L21/67288 , Y10T436/11
摘要： There are provided a system, method and computer program product for detecting foreign materials in a semiconductor manufacturing process. The manufacturing process uses a plurality of semiconductor manufacturing tools. The system categorizes at least one monitoring wafer according to one or more categories. The system supplies the categorized monitoring wafer to a semiconductor manufacturing tool. The system observes a level of contamination on the categorized monitoring wafer. The system compares the level of contamination to a threshold. The system cleans the tool in a response to determining that the level of contamination is larger than the threshold. The system determines which category of the wafer leaves a highest level of contamination on the tool. The system identifies a root cause of the highest level of contamination on the tool.
摘要翻译： 提供了一种用于在半导体制造工艺中检测异物的系统，方法和计算机程序产品。 制造工艺使用多个半导体制造工具。 该系统根据一个或多个类别对至少一个监视晶片进行分类。 该系统将分类的监控晶片提供给半导体制造工具。 该系统观察到分类监控晶片的污染程度。 系统将污染水平与阈值进行比较。 系统在响应中清洁工具以确定污染物的水平大于阈值。 该系统确定哪个类别的晶片在工具上留下最高的污染水平。 系统识别工具上最高污染水平的根本原因。
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公开(公告)号：US20110282472A1
公开(公告)日：2011-11-17
申请号：US12778457
申请日：2010-05-12
CPC分类号： G06N99/005 , G06F2217/10
摘要： A system for determining a group of semiconductor manufacturing process steps with a similar influence on individual semiconductor products. The system generates a first table including time stamps for the individual semiconductor products. The system creates a second table including Q-times based on the first table. The Q-times refers to time differences between every pair of the time stamps. The system forms a dependency table by grouping the Q-times with similar dependencies together. The system identifies groups of the similar dependencies. The system extracts semiconductor process steps belonging to the groups.
摘要翻译： 一种用于确定对各个半导体产品具有相似影响的一组半导体制造工艺步骤的系统。 该系统产生包括各个半导体产品的时间戳的第一表。 系统创建第二个表，其中包括基于第一个表的Q次。 Q时间是指每对时间戳之间的时差。 系统通过将Q次与相似的依赖关系分组在一起来形成依赖关系表。 系统识别类似依赖关系的组。 系统提取属于这些组的半导体工艺步骤。
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公开(公告)号：US20120330450A1
公开(公告)日：2012-12-27
申请号：US13604986
申请日：2012-09-06
IPC分类号： G06F17/50
CPC分类号： G06N99/005 , G06F2217/10
摘要： A system for determining a group of semiconductor manufacturing process steps with a similar influence on individual semiconductor products. The system generates a first table including time stamps for the individual semiconductor products. The system creates a second table including Q-times based on the first table. The Q-times refers to time differences between every pair of the time stamps. The system forms a dependency table by grouping the Q-times with similar dependencies together. The system identifies groups of the similar dependencies. The system extracts semiconductor process steps belonging to the groups.
摘要翻译： 一种用于确定对各个半导体产品具有相似影响的一组半导体制造工艺步骤的系统。 该系统产生包括各个半导体产品的时间戳的第一表。 系统创建第二个表，其中包括基于第一个表的Q次。 Q时间是指每对时间戳之间的时差。 系统通过将Q次与相似的依赖关系分组在一起来形成依赖关系表。 系统识别类似依赖关系的组。 系统提取属于这些组的半导体工艺步骤。
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公开(公告)号：US20110284029A1
公开(公告)日：2011-11-24
申请号：US12783702
申请日：2010-05-20
IPC分类号： B08B7/04
CPC分类号： B08B13/00 , H01L21/67288 , Y10T436/11
摘要： There are provided a system, method and computer program product for detecting foreign materials in a semiconductor manufacturing process. The manufacturing process uses a plurality of semiconductor manufacturing tools. The system categorizes at least one monitoring wafer according to one or more categories. The system supplies the categorized monitoring wafer to a semiconductor manufacturing tool. The system observes a level of contamination on the categorized monitoring wafer. The system compares the level of contamination to a threshold. The system cleans the tool in a response to determining that the level of contamination is larger than the threshold. The system determines which category of the wafer leaves a highest level of contamination on the tool. The system identifies a root cause of the highest level of contamination on the tool.
摘要翻译： 提供了一种用于在半导体制造工艺中检测异物的系统，方法和计算机程序产品。 制造工艺使用多个半导体制造工具。 该系统根据一个或多个类别对至少一个监视晶片进行分类。 该系统将分类的监控晶片提供给半导体制造工具。 该系统观察到分类监控晶片的污染程度。 系统将污染水平与阈值进行比较。 系统在响应中清洁工具以确定污染物的水平大于阈值。 该系统确定哪个类别的晶片在工具上留下最高的污染水平。 系统识别工具上最高污染水平的根本原因。
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8.发明申请METHOD FOR DETECTING HIGH IMPEDANCE FAULTS BY ANALYZING A LOCAL DEVIATION FROM A REGULARIZATION 失效通过从定期分析本地偏差来检测高阻抗性故障的方法公开(公告)号：US20090204347A1
公开(公告)日：2009-08-13
申请号：US12028466
申请日：2008-02-08
CPC分类号： G01R31/024
摘要： A method for detecting high impedance faults, including: receiving an input waveform from a circuit; computing a root mean square of the input waveform; fitting a regression line to the root mean squares; computing a deviation between the regression line and the root mean squares; determining whether the deviations are above a threshold; and outputting a value indicating that a fault has occurred in the circuit when the deviation is above the threshold and outputting a value indicating that a fault did not occur in the circuit when the deviation is below the threshold.
摘要翻译： 一种用于检测高阻抗故障的方法，包括：从电路接收输入波形; 计算输入波形的均方根; 拟合回归线到均方根; 计算回归线与均方根的偏差; 确定偏差是否高于阈值; 并且当偏差高于阈值时输出指示电路中发生故障的值，并且当偏差低于阈值时输出指示电路中没有发生故障的值。
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9.发明授权Method and system for extracting information from documents by document segregation 有权通过文件隔离从文件中提取信息的方法和系统公开(公告)号：US07983468B2
公开(公告)日：2011-07-19
申请号：US11053681
申请日：2005-02-09
申请人： Tayo Ibikunle , Ehud Karnin , William A. Liberis , Tomasz J. Nowicki , Michael J. Reilly , Howard E. Sachar , Charles P. Tresser , Eugene Walach , David A. Weeshoff
发明人： Tayo Ibikunle , Ehud Karnin , William A. Liberis , Tomasz J. Nowicki , Michael J. Reilly , Howard E. Sachar , Charles P. Tresser , Eugene Walach , David A. Weeshoff
IPC分类号： G06K9/00
CPC分类号： G06K9/72 , G06K2209/01 , G06Q20/042 , G06Q20/401
摘要： A method (and system) for extracting information from a document, includes segregating a set of documents from a plurality of documents based on a likelihood that at least one document in the set of documents carries an instance of a preset information.
摘要翻译： 一种用于从文档中提取信息的方法（和系统），包括基于文档集中的至少一个文档携带预设信息的实例的可能性，从多个文档中分离出一组文档。
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10.发明授权Method and system for discovering significant subsets in collection of documents 有权在文件收集中发现重要子集的方法和系统公开(公告)号：US07360686B2
公开(公告)日：2008-04-22
申请号：US11126211
申请日：2005-05-11
申请人： Robert Hoch , Tayo Ibikunle , Ehud Karnin , William A. Liberis , Tomasz J. Nowicki , Micheal J. Reilly , Howard E. Sachar , Charles P. Tresser , Eugene Walach
发明人： Robert Hoch , Tayo Ibikunle , Ehud Karnin , William A. Liberis , Tomasz J. Nowicki , Micheal J. Reilly , Howard E. Sachar , Charles P. Tresser , Eugene Walach
CPC分类号： G06Q20/042
摘要： A method (and system) of discovering a significant subset in a collection of documents, includes identifying a set of documents from a plurality of documents based on a likelihood that documents in the set of documents carries an instance of information that is characteristic to the documents in the set of documents.
摘要翻译： 一种发现文档集合中的重要子集的方法（和系统）包括：基于文档集中的文档携带文档特征的可能性，从多个文档中识别一组文档 在一套文件中。
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