专利检索 ap:("Robert L. Martin" OR "M. Martha Rajaratnam" OR "Pamela Turci") AND inv:"M. Martha Rajaratnam" 第 1 页

1.

发明授权
Photoactive esterification product of a diazooxide compound and a curcumin dye and photoresist materials with product 失效
标题翻译：重氮化合物和姜黄素染料与光致抗蚀剂材料的光活性酯化产物

公开(公告)号：US4818658A

公开(公告)日：1989-04-04

申请号：US39170

申请日：1987-04-17

申请人： Robert L. Martin , M. Martha Rajaratnam , Pamela Turci

发明人： Robert L. Martin , M. Martha Rajaratnam , Pamela Turci

IPC分类号： G03C1/72 , C07C67/00 , C07C301/00 , C07C309/69 , C07C309/76 , G03F7/022 , G03F7/09 , G03C1/54 , C07C113/00

CPC分类号： G03F7/022 , G03F7/091

摘要： The subject invention involves reduction of light reflection into a photoresist coating over a reflective substrate by the use of a photoactive compound in a photoresist formulation that is the reaction product of a diazooxide and curcumin.