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公开(公告)号：US07452058B2
公开(公告)日：2008-11-18
申请号：US11427453
申请日：2006-06-29
CPC分类号： B41J2/1629 , B41J2/14129 , B41J2/1603 , B41J2/1628 , B41J2/1631 , B41J2/1642 , B41J2/1645 , B41J2/1646 , Y10T29/49083
摘要： A substantially planar fluid ejection actuator and methods for manufacturing substantially planar fluid ejection actuators for micro-fluid ejection heads. One such fluid ejection actuator includes a conductive layer adjacent to a substrate that is configured to define an anode segment spaced apart from a cathode segment. A thermal barrier segment is disposed between the anode and cathode segments. A substantially planar surface is defined by the anode segment, and the thermal barrier segment. A resistive layer is applied adjacent to the substantially planar surface.
摘要翻译： 基本上平面的流体喷射致动器和用于制造用于微流体喷射头的基本上平面的流体喷射致动器的方法。 一个这样的流体喷射致动器包括与衬底相邻的导电层，其被配置为限定与阴极段间隔开的阳极段。 热障段设置在阳极和阴极段之间。 基本平坦的表面由阳极段和热障段限定。 电阻层与基本平坦的表面相邻地施加。
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2.发明申请PROTECTIVE LAYERS FOR MICRO-FLUID EJECTION DEVICES AND METHODS FOR DEPOSITING SAME 审中-公开用于微流体喷射装置的保护层及其沉积方法公开(公告)号：US20100321447A1
公开(公告)日：2010-12-23
申请号：US12851774
申请日：2010-08-06
CPC分类号： B41J2/14129 , B41J2/1603 , B41J2/1646 , B41J2202/03
摘要： Heater chips for a micro-fluid ejection device, such as those having a reduced energy requirement and more efficient production process therefor. One such heater chip includes a resistive layer deposited adjacent to a substrate and a protective layer deposited adjacent to the resistive layer. The protective layer can be a tantalum oxide protective layer, which has a high breakdown voltage. An optional cavitation layer of tantalum, which bonds well with the tantalum oxide layer, may be deposited adjacent to the protective layer. Alternatively, for example, the tantalum oxide layer may serve as both the protective layer and the cavitation layer.
摘要翻译： 用于微流体喷射装置的加热器芯片，例如具有降低的能量需求并且其更有效的生产工艺的那些。 一个这样的加热器芯片包括邻近衬底沉积的电阻层和邻近电阻层沉积的保护层。 保护层可以是具有高击穿电压的氧化钽保护层。 与氧化钽层良好结合的可选择的空穴层可以沉积在保护层附近。 或者，例如，氧化钽层可以用作保护层和空穴层两者。
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3.发明申请Protective Layers for Micro-Fluid Ejection Devices and Methods for Depositing the Same 审中-公开微流体喷射装置的保护层及其沉积方法公开(公告)号：US20080002000A1
公开(公告)日：2008-01-03
申请号：US11427549
申请日：2006-06-29
IPC分类号： B41J2/05
CPC分类号： B41J2/14129 , B41J2/1603 , B41J2/1646 , B41J2202/03
摘要： Heater chips for a micro-fluid ejection device, such as those having a reduced energy requirement and more efficient production process therefor. One such heater chip includes a resistive layer deposited adjacent to a substrate and a protective layer deposited adjacent to the resistive layer. The protective layer can be a tantalum oxide protective layer which has a high breakdown voltage. An optional cavitation layer of tantalum, which bonds well with the tantalum oxide layer, may be deposited adjacent to the protective layer. Alternatively, for example, the tantalum oxide layer may serve as both the protective layer and the cavitation layer.
摘要翻译： 用于微流体喷射装置的加热器芯片，例如具有降低的能量需求并且其更有效的生产工艺的那些。 一个这样的加热器芯片包括邻近衬底沉积的电阻层和邻近电阻层沉积的保护层。 保护层可以是具有高击穿电压的氧化钽保护层。 与氧化钽层良好结合的可选择的空穴层可以沉积在保护层附近。 或者，例如，氧化钽层可以用作保护层和空穴层两者。
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公开(公告)号：US20080001993A1
公开(公告)日：2008-01-03
申请号：US11427453
申请日：2006-06-29
IPC分类号： B41J2/15
CPC分类号： B41J2/1629 , B41J2/14129 , B41J2/1603 , B41J2/1628 , B41J2/1631 , B41J2/1642 , B41J2/1645 , B41J2/1646 , Y10T29/49083
摘要： A substantially planar fluid ejection actuator and methods for manufacturing substantially planar fluid ejection actuators for micro-fluid ejection heads. One such fluid ejection actuator includes a conductive layer adjacent to a substrate that is configured to define an anode segment spaced apart from a cathode segment. A thermal barrier segment is disposed between the anode and cathode segments. A substantially planar surface is defined by the anode segment, and the thermal barrier segment. A resistive layer is applied adjacent to the substantially planar surface.
摘要翻译： 基本上平面的流体喷射致动器和用于制造用于微流体喷射头的基本上平面的流体喷射致动器的方法。 一个这样的流体喷射致动器包括与衬底相邻的导电层，其被配置为限定与阴极段间隔开的阳极段。 热障段设置在阳极和阴极段之间。 基本平坦的表面由阳极段和热障段限定。 电阻层与基本平坦的表面相邻地施加。
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5.发明授权Planar heater stack and method for making planar heater stack with cavity within planar heater substrata above substrate 有权平面加热器堆叠和方法，用于在基板上方的平面加热器基底内制造具有空腔的平面加热器堆叠公开(公告)号：US08414786B2
公开(公告)日：2013-04-09
申请号：US12265342
申请日：2008-11-05
CPC分类号： B41J2/05 , B41J2/14129 , B41J2/1603 , B41J2/1626 , B41J2/1631 , B41J2/1642 , B41J2/1645 , H05B3/10 , Y10T29/49002
摘要： A heater stuck includes first strata having a planar configuration supporting and forming a fluid heater element responsive to repetitive electrical activation and deactivation to produce repetitive cycles of fluid ejection from an ejection chamber above the heater element and second strata having a planar configuration coating the heater element of the first strata and being contiguous with the ejection chamber to protect the heater element. The first strata include a substrate and heater strata disposed on it and forming a cavity above the substrate and encompassed on three sides by the heater substrata. The heater substrata includes a pair of conductive layer portions constituting terminal leads disposed on the substrate at opposite sides of the cavity and a resistive layer disposed on the conductive layer portions and defining the fluid heater element that spans the top of the cavity.
摘要翻译： 加热器卡住包括支撑并形成流体加热器元件的第一层，其响应于重复的电激活和停用，以产生从加热器元件上方的喷射室流体喷射的重复循环，并且具有涂覆加热器元件的平面构造的第二层 并且与喷射室邻接以保护加热器元件。 第一层包括设置在其上的衬底和加热器层，并在衬底上形成空腔，并且通过加热器衬底包围在三侧。 加热器基体包括一对导电层部分，构成在空腔的相对侧设置在基板上的端子引线，以及设置在导电层部分上并限定跨过空腔顶部的流体加热器元件的电阻层。
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6.发明申请PLANAR HEATER STACK AND METHOD FOR MAKING PLANAR HEATER STACK WITH CAVITY WITHIN PLANAR HEATER SUBSTRATA ABOVE SUBSTRATE 有权平面加热器堆叠和方法，用于在上述平面加热器底部制造具有空腔的平面加热器堆叠公开(公告)号：US20130076837A1
公开(公告)日：2013-03-28
申请号：US13432209
申请日：2012-03-28
IPC分类号： B41J2/05
CPC分类号： B41J2/05 , B41J2/14129 , B41J2/1603 , B41J2/1626 , B41J2/1631 , B41J2/1642 , B41J2/1645 , H05B3/10 , Y10T29/49002
摘要： A heater stuck includes first strata having a planar configuration supporting and forming a fluid heater element responsive to repetitive electrical activation and deactivation to produce repetitive cycles of fluid ejection from an ejection chamber above the heater element and second strata having a planar configuration coating the heater element of the first strata and being contiguous with the ejection chamber to protect the heater element. The first strata include a substrate and heater strata disposed on it and forming a cavity above the substrate and encompassed on three sides by the heater substrata. The heater substrata includes a pair of conductive layer portions constituting terminal leads disposed on the substrate at opposite sides of the cavity and a resistive layer disposed on the conductive layer portions and defining the fluid heater element that spans the top of the cavity.
摘要翻译： 加热器卡住包括支撑并形成流体加热器元件的第一层，其响应于重复的电激活和停用，以产生从加热器元件上方的喷射室流体喷射的重复循环，并且具有涂覆加热器元件的平面构造的第二层 并且与喷射室邻接以保护加热器元件。 第一层包括设置在其上的衬底和加热器层，并在衬底上形成空腔，并且通过加热器衬底包围在三侧。 加热器基体包括一对导电层部分，构成在空腔的相对侧设置在基板上的端子引线，以及设置在导电层部分上并限定跨过空腔顶部的流体加热器元件的电阻层。
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公开(公告)号：US20110123932A1
公开(公告)日：2011-05-26
申请号：US12622479
申请日：2009-11-20
IPC分类号： G03F7/20 , H01L21/3065 , C23F1/00 , H01L21/308
CPC分类号： B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1639 , B41J2/1645
摘要： Methods are described for forming a fluid ejection device on a substrate having a first surface and a second surface, the first surface having plurality of electrical heater elements. A sacrificial polymer layer is added over the first surface, a conformal material over the sacrificial polymer layer forms a nozzle layer, the sacrificial polymer is then removed to form ink ejection chambers, the nozzle layer is removed to form nozzle holes, a mask layer is used to form an exposed region and an unexposed region, the exposed region defining a central ink via, which is then etched to form the central ink via.
摘要翻译： 描述了在具有第一表面和第二表面的基底上形成流体喷射装置的方法，第一表面具有多个电加热器元件。 在第一表面上添加牺牲聚合物层，牺牲聚合物层上的共形材料形成喷嘴层，然后除去牺牲聚合物以形成喷墨室，除去喷嘴层以形成喷嘴孔，掩模层为 用于形成曝光区域和未曝光区域，暴露区域限定中心墨水通孔，然后将其中的墨水经过蚀刻以形成中心墨水通孔。
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8.发明授权Planar heater stack and method for making planar heater stack with cavity within planar heater substrata above substrate 有权平面加热器堆叠和方法，用于在基板上方的平面加热器基底内制造具有空腔的平面加热器堆叠公开(公告)号：US08888251B2
公开(公告)日：2014-11-18
申请号：US13432209
申请日：2012-03-28
CPC分类号： B41J2/05 , B41J2/14129 , B41J2/1603 , B41J2/1626 , B41J2/1631 , B41J2/1642 , B41J2/1645 , H05B3/10 , Y10T29/49002
摘要： A heater stuck includes first strata having a planar configuration supporting and forming a fluid heater element responsive to repetitive electrical activation and deactivation to produce repetitive cycles of fluid ejection from an ejection chamber above the heater element and second strata having a planar configuration coating the heater element of the first strata and being contiguous with the ejection chamber to protect the heater element. The first strata include a substrate and heater strata disposed on it and forming a cavity above the substrate and encompassed on three sides by the heater substrata. The heater substrata includes a pair of conductive layer portions constituting terminal leads disposed on the substrate at opposite sides of the cavity and a resistive layer disposed on the conductive layer portions and defining the fluid heater element that spans the top of the cavity.
摘要翻译： 加热器卡住包括支撑并形成流体加热器元件的第一层，其响应于重复的电激活和停用，以产生从加热器元件上方的喷射室流体喷射的重复循环，并且具有涂覆加热器元件的平面构造的第二层 并且与喷射室邻接以保护加热器元件。 第一层包括设置在其上的衬底和加热器层，并在衬底上形成空腔，并且通过加热器衬底包围在三侧。 加热器基体包括一对导电层部分，构成在空腔的相对侧设置在基板上的端子引线，以及设置在导电层部分上并限定跨过空腔顶部的流体加热器元件的电阻层。
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公开(公告)号：US08366245B2
公开(公告)日：2013-02-05
申请号：US12344706
申请日：2008-12-29
IPC分类号： B41J2/05
CPC分类号： B41J2/1412 , B41J2/14129 , B41J2/1603 , B41J2/1628 , B41J2/1639 , B41J2/1642 , B41J2/1645 , B41J2/1646 , Y10T29/49
摘要： A fin-shaped heater stack includes first strata configured to support and form fluid heater elements responsive to repetitive electrical activation and deactivation to produce repetitive cycles of ejection of a fluid, and second strata on the first strata to protect the fluid heater elements from adverse effects of the repetitive cycles of fluid ejection and of contact with the fluid. The first strata include a substrate having a front surface, and heater substrata supported on the front surface. The heater substrata have opposite facing side surfaces which extend approximately perpendicular to the front surface and an end surface interconnecting the side surfaces which extends approximately parallel to the front surface such that the heater substrata is provided in either an upright or inverted fin-shaped configuration on the substrate with the fluid heater elements forming the opposite facing side surfaces of the heat substrata.
摘要翻译： 鳍状加热器堆叠包括构造成支撑并形成流体加热器元件的第一层，其响应于重复的电激活和停用以产生流体的重复循环和第一层上的第二层，以保护流体加热器元件免受不利影响 流体喷射和与流体接触的重复循环。 第一层包括具有前表面的基底和支撑在前表面上的加热器基底。 加热器基体具有相对的前表面大致垂直延伸的相对的侧表面，以及使大致平行于前表面延伸的侧表面相互连接的端面，使得加热器基底以直立或倒立的翅片形状设置在 具有流体加热器元件的基底形成加热基底的相对面对的侧表面。
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10.发明授权Heater stack having resistive layer with underlying insulative gap and method for making heater stack 有权具有下层绝缘间隙的电阻层的加热器堆叠和用于制造加热器堆叠的方法公开(公告)号：US08042912B2
公开(公告)日：2011-10-25
申请号：US12345091
申请日：2008-12-29
IPC分类号： B41J2/05
CPC分类号： B41J2/14129 , B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1642 , B41J2/1646
摘要： A heater stack includes first strata configured to support and form a fluid heater element responsive to energy from repetitive electrical activation and deactivation to fire repetitive cycles of heating and ejecting fluid from an ejection chamber above the fluid heater element and second strata overlying the first strata and contiguous with the ejection chamber to provide protection of the fluid heater element. The first strata includes a substrate and a heater substrata overlying the substrate and including a resistive layer having lateral portions spaced apart, a central portion extending between the lateral portions and defining the fluid heater element, and transitional portions interconnecting the central portion and lateral portions and elevating the central portion relative to the lateral portions and above the substrate to form a gap between the lateral portions and between the central portion and substrate insulating the substrate from the fluid heater element.
摘要翻译： 加热器堆叠包括构造成支撑并形成流体加热器元件的第一层，所述第一层响应于来自重复的电激活和去激活的能量来发射加热和喷射流体的重复循环，所述喷射室从位于流体加热器元件上方的喷射室和覆盖在第一层上的第二层， 与喷射室邻接以提供对流体加热器元件的保护。 第一层包括衬底和覆盖衬底的加热器衬底，并且包括具有间隔开的侧面部分的电阻层，在侧面部分之间延伸并限定流体加热器元件的中心部分，以及将中心部分和侧部部分互连的过渡部分 相对于侧面部分和基板上方升高中心部分，以在侧向部分之间以及中心部分和基板之间形成间隙，从而使基板与流体加热器元件绝缘。
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