公开(公告)号：US20110037492A1

公开(公告)日：2011-02-17

申请号：US12600153

申请日：2008-05-15

申请人： Ronald C. Seubert ,  Geoffrey Hilton ,  Rex H. Sandbach

发明人： Ronald C. Seubert ,  Geoffrey Hilton ,  Rex H. Sandbach

IPC分类号： G01R31/00 ,  G01R31/26

CPC分类号： G01R1/0491

摘要： An apparatus for electrically testing a semiconductor device is herein disclosed. The apparatus includes carriers for a semiconductor device and a probe card (52) that are adapted for complementary registration with one another. The coupled carriers may be stacked or used in another high-density arrangement during electrical test or burn-in to improve test cell utilization.

摘要翻译： 本文公开了一种用于电测试半导体器件的装置。 该装置包括用于半导体器件的载体和适合互相配准的探针卡（52）。 耦合的载体可以在电测试或老化期间以另一高密度布置堆叠或使用，以提高测试电池的利用率。

公开(公告)号：US4694776A

公开(公告)日：1987-09-22

申请号：US747662

申请日：1985-06-21

申请人： Rex H. Sandbach ,  Alan Poole

发明人： Rex H. Sandbach ,  Alan Poole

IPC分类号： G03F7/20 ,  B05C13/02

CPC分类号： G03F7/70716

摘要： Step and repeat apparatus used for performance operations upon a generally planar component such as a microprocessor wafer comprises a support for a workpiece, the support being attached by means of an arm to a mechanism adapted to move the support in two dimensions, the arm being pivotally secured to said mechanism at a location remote from the support and lifting means arranged to move the support about the pivot in a plane perpendicular to said two dimensions.

摘要翻译： 用于在诸如微处理器晶片的大致平面的部件上进行性能操作的步骤和重复装置包括用于工件的支撑件，所述支撑件借助于臂被附接到适于在两个维度上移动所述支撑件的机构，所述臂枢转 在远离支撑件的位置处固定到所述机构，并且提升装置被布置成在垂直于所述两个维度的平面中围绕枢轴移动支撑件。