Moisture sensor with valve metal composition electrodes
    3.
    发明授权
    Moisture sensor with valve metal composition electrodes 失效
    水分传感器带阀门金属组成电极

    公开(公告)号:US4482882A

    公开(公告)日:1984-11-13

    申请号:US445656

    申请日:1982-11-30

    CPC分类号: G01N27/225 G01N27/121

    摘要: A moisture sensor comprises a moisture-sensitive layer formed from the oxide of highly resistive porous low density tantalum on a moisture-insensitive substrate. Between the substrate and the moisture-sensitive tantalum oxide layer there is a base electrode of an anodically oxidizable metal, preferably tantalum, of a density higher than the density of the low density tantalum from which the tantalum oxide layer is formed. A covering electrode partially covering the tantalum oxide layer has windows through which the water vapor containing medium can penetrate into the moisture-sensitive tantalum oxide layer. The inactive regions of the tantalum oxide layer disposed below the windows are removed to increase the rate of response.

    摘要翻译: 湿度传感器包括由不透湿基底上的高阻力多孔低密度钽的氧化物形成的湿度敏感层。 在基板和湿敏钽氧化物层之间,存在密度高于形成氧化钽层的低密度钽的密度的阳极可氧化金属(优选钽)的基极。 部分覆盖钽氧化物层的覆盖电极具有窗口,含水蒸汽的介质可以穿过该窗口可渗透到湿敏钽氧化物层中。 去除设置在窗户下方的氧化钽层的非活性区域以增加响应速率。